Carbon Nanotube Pellicle Film Structure for Uniform EUV Transmittance

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Solution Overview

Problem

Pellicle films made of carbon nanotubes suffer from insufficient in-plane transmittance uniformity due to non-uniform distribution of carbon nanotubes.

Innovation Solution

A pellicle film is designed with a structure comprising first and second carbon nanotubes extending in different directions, forming a woven textile with controlled intersections and pores, ensuring uniform distribution and high transmittance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If carbon nanotubes are used to make pellicle films, then heat resistance is improved, but in-plane transmittance uniformity deteriorates due to non-uniform distribution

Engineering Contradiction:

Improveheat resistanceVSAvoidin-plane transmittance uniformity

Core Design Contradiction:

TemperatureVSManufacturing precision

Solution Approach 1:

The pellicle film is segmented into multiple layers, each containing carbon nanotubes with specific orientation patterns. This layered segmentation allows each layer to contribute to uniform transmittance while maintaining the overall heat resistance of the composite structure.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The invention uses composite material structure by combining carbon nanotubes with specific matrices or coatings. This composite approach maintains the heat resistance of carbon nanotubes while the matrix material helps distribute them uniformly, improving in-plane transmittance uniformity.

Inventive Principle:

Principle #40Composite materials

2Object-affected harmful factors

If carbon nanotubes are distributed to provide coverage, then dust prevention is improved, but transmittance uniformity worsens due to aggregation

Engineering Contradiction:

Improvedust preventionVSAvoidtransmittance uniformity

Core Design Contradiction:

Object-affected harmful factorsVSManufacturing precision

Solution Approach 1:

The invention applies local quality by creating regions with different carbon nanotube densities or orientations. Specific areas have optimized nanotube arrangements to prevent dust aggregation while maintaining uniform light transmission across the entire pellicle surface.

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The pellicle film incorporates porous structures that allow uniform distribution of carbon nanotubes. The porous matrix prevents nanotube aggregation while providing sufficient coverage for dust prevention, maintaining both protective function and transmittance uniformity.

Inventive Principle:

Principle #31Porous materials

Data Source

PatentUS12554192B2Pellicle film, pellicle, carbon nanotube web and production method therefor, carbon nanotube film, and carbon nanotube thread and production method therefor

Publication Date: 2026.02.17 TOPPAN INC

AI summary

A technique that can achieve a pellicle film made of carbon nanotubes and having high in-plane transmittance uniformity. The pellicle film contains a plurality of first carbon nanotubes extending in a first direction and arrayed in the radial direction, and a plurality of second carbon nanotubes extending in a second direction intersecting the first direction, and arrayed in their radial direction.