Heterogeneous CNT-PTFE Composite Structure for Lower Molding Waste
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Solution Overview
Problem
The semiconductor industry faces material loss and high production costs due to the use of carbon nanotube-polytetrafluoroethylene (CNT-PTFE) in manufacturing equipment components, where compression molding results in waste and cracks, necessitating a more efficient composite material and manufacturing method.
Innovation Solution
A heterogeneous composite material is created by compressing carbon nanotube-polytetrafluoroethylene (CNT-PTFE) and polytetrafluoroethylene (PTFE) in a mold with a frame forming a boundary surface, allowing for a mixed or single layer structure with different electrical conductivity, reducing material waste and production costs by using PTFE in non-essential areas.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If CNT-PTFE is used throughout the component to ensure chemical resistance and abrasion resistance, then the reliability is improved, but the manufacturing cost increases and material loss occurs
Solution Approach 1:
The patent applies different materials to different regions of the component based on functional requirements. CNT-PTFE is used only in the first compression structure where chemical resistance and abrasion resistance are critical, while PTFE is used in the second compression structure where these properties are less demanding. This local differentiation reduces overall material cost and loss while maintaining reliability where needed.
Solution Approach 2:
The patent creates a composite structure combining two different fluoroplastic materials (CNT-PTFE and PTFE) in a single molded component. The heterogeneous composite allows optimization of material properties in different regions, achieving both high reliability in critical areas and cost efficiency in non-critical areas.
2Reliability
If compression molding is used to manufacture components to improve chemical resistance and abrasion resistance, then the reliability is improved, but cracks occur and material loss increases
Solution Approach 1:
The patent differentiates material properties in different regions to match functional requirements. The CNT-PTFE in the first compression structure provides enhanced abrasion resistance where needed, while the PTFE in the second compression structure reduces compression resistance and prevents crack formation in areas where high abrasion resistance is not critical.
Solution Approach 2:
The patent changes the material composition parameter from homogeneous CNT-PTFE to a heterogeneous combination of CNT-PTFE and PTFE. This parameter change optimizes the balance between abrasion resistance and compression resistance, reducing crack formation during molding while maintaining chemical resistance.
3Ease of manufacture
If a heterogeneous composite material with different materials is used to reduce material loss, then the manufacturing cost decreases, but the structural complexity increases
Solution Approach 1:
The patent merges two different materials (CNT-PTFE and PTFE) into a single heterogeneous composite component that is molded in one operation. This combining approach reduces manufacturing complexity compared to producing separate components and assembling them, while still achieving cost reduction through optimized material usage.
Solution Approach 2:
The patent creates a heterogeneous composite material structure that integrates two fluoroplastic materials with different properties. This composite structure optimizes material utilization by placing each material where it is most effective, reducing overall manufacturing cost while managing structural complexity through a unified molding process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach minimizes material waste and production costs by utilizing PTFE in non-essential areas, preventing cracks and reducing the unit cost of semiconductor manufacturing equipment components while maintaining the necessary properties of CNT-PTFE in critical areas.
Implementation Method 1
simultaneously compressing the first material and the second material to generate a heterogeneous composite material
Data Source
AI summary
A heterogeneous composite material and a method for manufacturing the heterogeneous composite material are provided. The heterogeneous composite material includes a first compression structure formed by compressing a first material, and a second compression structure formed by compressing a second material different from the first material, and disposed in close contact with the first compression structure, wherein at least a portion of the first compression structure and at least a portion of the second compression structure are disposed on both sides of a boundary surface existing in a circular shape with a predetermined radius with respect to a central axis in a state in contact with each other at the boundary surface.