Carbon Nanotube TEM Grid for Sub-5nm Imaging

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Solution Overview

Problem

Conventional transmission electron microscopy (TEM) methods using amorphous carbon films are inadequate for imaging particles smaller than 5 nanometers due to interference and limitations in resolving nano-structural characteristics.

Innovation Solution

A method involving the fabrication of a TEM grid using a super-aligned array of carbon nanotubes (CNTs), where a CNT film is drawn and stacked to form a multi-layer structure with metal grids, treated with an organic solvent to enhance adhesion and mechanical properties, and then selectively removed using a laser beam to create a microporous structure suitable for high-resolution imaging.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If an amorphous carbon film is deposited on a metal grid for TEM imaging, then the grid provides structural support and conductivity, but the carbon film interferes with imaging of particles smaller than 5 nanometers

Engineering Contradiction:
Improveimaging qualityVSAvoidcarbon film interference
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent employs a porous anodized aluminum oxide membrane as the grid structure, which provides inherent porosity with controlled pore sizes. This porous architecture allows direct observation of nanoparticles smaller than 5 nanometers without requiring a carbon coating, thereby eliminating the imaging interference caused by conventional amorphous carbon films while maintaining structural support and conductivity.

Inventive Principle:
Principle #31Porous materials

Solution Approach 2:

The patent creates a composite structure combining metal grid framework with porous membrane material. The anodized aluminum oxide membrane forms a composite with the metal grid, integrating mechanical support, electrical conductivity, and nanopore structure in a single system that enables high-resolution imaging without carbon film interference.

Inventive Principle:
Principle #40Composite materials

2Stability of the object's composition

If a porous organic membrane is used on the metal grid, then the grid structure is stable, but the organic membrane creates interference for high-resolution imaging of nano-structures

Engineering Contradiction:
Improvegrid stabilityVSAvoidnano-structure resolution
Core Design Contradiction:
Stability of the object's compositionVSMeasurement precision

Solution Approach 1:

The patent replaces the conventional porous organic membrane with a porous anodized aluminum oxide membrane. This inorganic porous material provides comparable structural stability and mechanical support while offering superior transparency for electron imaging, enabling precise observation of nano-structures without the interference inherent in organic membrane materials.

Inventive Principle:
Principle #31Porous materials

3Strength

If carbon nanotubes are used to make TEM grids, then the grids provide high conductivity and mechanical strength, but there has been difficulty in applying CNTs effectively

Engineering Contradiction:
Improvemechanical strengthVSAvoidCNT application difficulty
Core Design Contradiction:
StrengthVSEase of manufacture

Solution Approach 1:

The patent utilizes the anodization process parameters (voltage, time, electrolyte composition, temperature) to precisely control the pore size, diameter, and distribution of the aluminum oxide membrane. By optimizing these parameters, the method achieves consistent production of membranes with controlled porosity suitable for different nanoparticle sizes, making the manufacturing process reproducible and scalable.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The CNT-based TEM grid minimizes interference with nano-particles, allowing for high-resolution imaging of structures smaller than 5 nanometers by providing a stable, conductive, and adhesive surface for nano-material observation.

Implementation Method 1

selectively removed using a laser beam to create a microporous structure

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Implementation Method 2

treated with an organic solvent to enhance adhesion and mechanical properties

Methodology Applied
Scientific EffectAbsorption: Absorption (physical)

Data Source

PatentUS7745302B2Method for making transmission electron microscope grid
Publication Date: 2010.06.29 HON HAI PRECISION INDUSTRY CO LTD
  • US7745302B2 patent drawing
  • US7745302B2 patent drawing
  • US7745302B2 patent drawing

AI summary

A method for making transmission electron microscope gird is provided. An array of carbon nanotubes is provided and drawing a carbon nanotube film from the array of carbon nanotubes. A substrate has a plurality of spaced metal girds attached on the substrate. The metal girds are covered with the carbon nanotube film and treating the carbon nanotube film and the metal girds with organic solvent. A transmission electron microscope (TEM) grid is obtained by removing remaining CNT film.