Carbon Nanotube Thin Film Transistor with Charge-Resistant Passivation

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Carbon nanotube-based thin film transistors (TFTs) experience severe hysteresis due to charge mixing with water and oxygen molecules, leading to ambipolar conduction and poor switching performance.

Innovation Solution

A thin film transistor design incorporating a carbon nanotube active layer with a charge-resistant passivation layer, such as aluminum oxide, and a dual-gate structure with electrically insulated sub-TFTs, along with a filling medium that allows only one type of carrier to pass through, to reduce surface charges and achieve unipolar conduction.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If the active layer is made of carbon nanotube material, then carrier mobility is improved, but hysteresis increases due to charge mixing with water and oxygen molecules

Engineering Contradiction:
Improvecarrier mobilityVSAvoidhysteresis
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

A passivation layer is introduced as an intermediary between the carbon nanotube active layer and the external environment (water and oxygen molecules). This passivation layer prevents charge mixing while maintaining the high carrier mobility of the carbon nanotube material, thereby reducing hysteresis without sacrificing speed

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The device structure is transformed into a composite system combining carbon nanotube material with passivation layer materials. This composite structure leverages the high mobility of carbon nanotubes while the passivation layer provides protection against environmental degradation, resolving the contradiction between speed and reliability

Inventive Principle:
Principle #40Composite materials

2Reliability

If a passivation layer is added to reduce mobile charges, then hysteresis is reduced, but device complexity increases

Engineering Contradiction:
Improvehysteresis reductionVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The device is segmented into distinct functional layers: the active layer for charge transport and the passivation layer for charge management. This segmentation allows each layer to perform its specific function efficiently, reducing hysteresis while maintaining a relatively simple overall structure that can be integrated into existing device architectures

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces hysteresis and enables unipolar conduction, improving the TFT's switching performance and functionality as a reliable switch.

Implementation Method 1

the passivation layer is made of a charge-resistant material capable of reducing mobile charges on a surface of the carbon nanotube material

Methodology Applied
Scientific EffectCharge-resistant material effect:

Implementation Method 2

The gap between the first active layer and the second active layer is provided with a first filling medium made of an electrically-insulating and transparent material

Methodology Applied
Scientific EffectCarrier selective transport:

Data Source

PatentUS10586937B2Thin film transistor, fabricating method and driving method thereof, and display device
Publication Date: 2020.03.10 BOE TECHNOLOGY GROUP CO LTD
  • US10586937B2 patent drawing
  • US10586937B2 patent drawing
  • US10586937B2 patent drawing

AI summary

The present application provides a thin film transistor, a method for fabricating the same, a method for driving the same, and a display device. The thin film transistor includes a gate pattern, a gate insulation layer, an active layer pattern, a source/drain pattern, and a passivation layer. The active layer pattern is made of a carbon nanotube material, and the passivation layer is made of a charge-resistant material capable of reducing mobile charges on a surface of the carbon nanotube material.