Carbon Nanotube Transistor Doping via Ion Adsorption

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Solution Overview

Problem

Existing methods for doping carbon nanotubes in field effect transistors face challenges in stabilizing and controlling the position of doping ions, particularly with oxygen ions being difficult to separate and handle, limiting the effectiveness of n-type doping.

Innovation Solution

A method involving the use of a nitronium hexafluoroantimonate solution to adsorb ions on the surface of carbon nanotubes, with controlled voltages to stabilize and position the ions, allowing for both p- and n-doping, and the formation of a passivation layer to maintain ion adsorption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If oxygen ions are used for n-type doping, then n-type CNT can be formed, but the oxygen ions cannot be easily separated from oxygen molecules

Engineering Contradiction:
Improvedoping processVSAvoidion separation
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

The patent uses a liquid precursor solution containing oxygen-containing species as an intermediary medium. Instead of directly introducing oxygen ions that are difficult to separate, the solution serves as a carrier that delivers oxygen-containing dopants to the CNT surface, where they can be adsorbed and then thermally treated to achieve stable n-type doping without requiring complex ion separation equipment.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent changes the physical state of the dopant from gaseous oxygen ions to a liquid precursor solution. This parameter change allows for easier handling and delivery of the dopant species. The solution can be precisely controlled in concentration and applied uniformly, and subsequent thermal treatment transforms the liquid-phase dopant into the desired adsorbed state on the CNT surface.

Inventive Principle:
Principle #35Parameter changes

2Ease of manufacture

If potassium ions are used for doping, then doping can be achieved, but handling the potassium ions is difficult

Engineering Contradiction:
Improvedoping capabilityVSAvoidion handling
Core Design Contradiction:
Ease of manufactureVSEase of operation

Solution Approach 1:

The liquid precursor solution acts as an intermediary that simplifies potassium ion handling. Instead of directly manipulating potassium ions which are difficult to handle, the solution delivers potassium-containing dopants in a stable, liquid form that can be easily applied. The solution formulation allows for controlled delivery and subsequent thermal activation without requiring complex ion manipulation equipment or procedures.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent employs liquid-phase delivery (hydraulic approach) instead of gaseous or solid-phase ion delivery. The precursor solution can be applied using simple liquid handling techniques such as drop-casting, spin-coating, or dip-coating, which are much easier to implement than ion beam or vapor-phase doping methods required for direct potassium ion introduction.

Inventive Principle:
Principle #29Pneumatics and hydraulics

3Ease of manufacture

If doping ions are applied without position control, then doping can be performed, but the position of doping ions cannot be controlled

Engineering Contradiction:
Improvedoping processVSAvoidion position control
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent applies preliminary action by first forming a gate electrode structure and applying gate voltage before introducing the dopant solution. This pre-established electric field configuration guides the subsequent dopant deposition process, ensuring ions are positioned in the desired location (accumulation or depletion region) before the actual doping occurs. The gate structure is prepared in advance to control the final ion positioning.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent uses dynamic control of gate voltage during the doping process to achieve precise ion positioning. By adjusting the gate voltage magnitude and polarity, the electric field distribution changes dynamically, allowing control over where dopant ions accumulate or deplete on the CNT surface. This dynamic voltage control enables flexible positioning of doping ions according to device requirements.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method enables stable and controlled doping of carbon nanotubes, enhancing the performance of field effect transistors by achieving precise ion positioning and improving the ON/OFF ratio and current characteristics, facilitating the manufacture of both p-type and n-type transistors.

Implementation Method 1

applying a first voltage to the gate, and adsorbing ions on a surface of the CNT

Methodology Applied
Scientific EffectAdsorption: Adsorption

Implementation Method 2

dropping a nitronium hexafluoroantimonate (NHFA) solution onto a surface of the CNT

Methodology Applied
Scientific EffectIon transfer: Ion Exchange

Implementation Method 3

moving the ions on the CNT towards the drain or source by applying a second voltage between the source and the drain

Methodology Applied
Scientific EffectElectrophoresis: Electrophoresis

Data Source

PatentUS7723223B2Method of doping transistor comprising carbon nanotube, method of controlling position of doping ion, and transistors using the same
Publication Date: 2010.05.25 SAMSUNG ELECTRONICS CO LTD
  • US7723223B2 patent drawing
  • US7723223B2 patent drawing
  • US7723223B2 patent drawing

AI summary

Provided are a method of doping a carbon nanotube (CNT) of a field effect transistor and a method of controlling the position of doping ions. The method may include providing a source, a drain, the CNT as a channel between the source and the drain, and a gate, applying a first voltage to the gate, and adsorbing ions on a surface of the CNT.