CO2 Beam Source Catalyst Layout for Stable Laser Power

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Solution Overview

Problem

CO2 beam sources face efficiency drops due to dissociation products like carbon monoxide forming during gas discharge, leading to deposition effects that degrade catalysts and reduce power, especially when catalysts are placed within discharge tubes.

Innovation Solution

A CO2 beam source design with a catalyst comprising precious metal nanoparticles applied to a substrate, arranged with clearance from the discharge tube to reduce deposition of degradation products, operating at temperatures above 60°C to effectively catalyze oxidation of dissociation products with molecular oxygen.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the catalyst is placed within the discharge tube to maximize contact with dissociation products, then the catalysis efficiency is improved, but deposition of degradation products on the catalyst increases leading to power drop

Engineering Contradiction:
Improvecatalysis efficiencyVSAvoidpower stability
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The catalyst is extracted from the discharge tube and placed in a separate catalyst chamber connected via a bypass channel. This separation removes the catalyst from the harsh environment where degradation products are formed, preventing deposition on the catalyst while maintaining its ability to oxidize CO through the bypass connection.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

A bypass channel acts as an intermediary pathway, allowing dissociation products to reach the catalyst chamber without requiring the catalyst to be directly exposed to the discharge environment. This mediator enables the catalytic function while protecting the catalyst from degradation.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If the catalyst is placed away from the discharge tube to avoid deposition, then catalyst degradation is reduced, but contact with dissociation products decreases reducing catalysis effectiveness

Engineering Contradiction:
Improvecatalyst stabilityVSAvoidcatalysis effectiveness
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The catalyst chamber is merged with the main gas circuit through the bypass channel, creating a unified flow path where dissociation products from the discharge tube are directed to the catalyst chamber. This merging ensures continuous contact between dissociation products and the catalyst without direct exposure to the discharge environment.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The bypass channel serves as an intermediary transport path, carrying dissociation products from the discharge tube to the remotely positioned catalyst chamber, thereby maintaining catalytic effectiveness while protecting the catalyst from degradation.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Productivity

If additional heating devices are added to maintain catalyst temperature, then catalysis activity is improved, but device complexity and cost increase

Engineering Contradiction:
Improvecatalysis activityVSAvoidstructural complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The catalyst chamber is designed to utilize the thermal energy already present in the laser gas flow to maintain the catalyst temperature. The hot gas passing through the bypass channel and into the catalyst chamber provides sufficient heat for catalytic activity, eliminating the need for external heating devices.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The laser gas flow serves multiple functions: it cools the discharge tube, carries dissociation products to the catalyst chamber, and simultaneously heats the catalyst to the required operating temperature. This multi-functionality eliminates the need for separate heating systems.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This arrangement maintains high and long-term stable power and efficiency by minimizing deposition effects and allowing effective catalysis, reducing the need for additional heating and structural complexity, while enabling easy maintenance with replaceable catalysts.

Implementation Method 1

at least one catalyst for catalyzing oxidation of dissociation products which are formed upon excitation of the laser gas

Methodology Applied
Scientific EffectCatalysis: Catalysis

Implementation Method 2

oxidation of dissociation products, in particular for oxidation of CO to CO2

Methodology Applied
Scientific EffectOxidation: Oxidation

Implementation Method 3

The laser gas is excited electrically. To this end, the laser gas is excited in the discharge tube, typically a quartz glass tube, via a gas discharge at high DC voltage or high-frequency AC voltage

Methodology Applied
Scientific EffectGas discharge: Townsend Discharge

Implementation Method 4

a laser gas serves as a laser medium

Methodology Applied
Scientific EffectLaser: Laser

Implementation Method 5

a fan for supplying the laser gas into the at least one discharge tube via at least one supply element and for removing the laser gas from the at least one discharge tube via at least one removal element in a closed laser gas circuit

Methodology Applied
Scientific EffectForced convection: Forced Convection

Data Source

PatentUS20240120700A1Co2 beam source comprising a catalyst
Publication Date: 2024.04.11 TRUMPF LASER SYSTEMS FOR SEMICONDUCTOR MANUFACTURING GMBH
  • US20240120700A1 patent drawing
  • US20240120700A1 patent drawing

AI summary

A CO2 beam source includes a discharge tube in which a laser gas serves as a laser medium, a fan for supplying the laser gas into the discharge tube via a supply element and for removing the laser gas from the discharge tube via a removal element in a closed laser gas circuit, and a catalyst for catalysing oxidation of dissociation products formed upon excitation of the laser gas. The catalyst includes precious metal nanoparticles applied to a substrate. The catalyst is arranged with clearance from the discharge tube in the flow direction of the laser gas within the closed laser gas circuit in order to reduce deposition of degradation products formed in the discharge tube upon excitation of the laser gas compared to an arrangement within the discharge tube. A temperature of the at least one catalyst during operation of the CO2 beam source is at least 60° C.