High Pressure CO2 Laser Dielectric Electrode Design

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Solution Overview

Problem

Existing RF excited, sealed-off, diffusion cooled CO2 lasers face challenges in operating at high gas pressures due to the occurrence of arcs, hot spots, and corona ionization, which reduce efficiency and prevent reliable operation above 150 Torr, limiting their ability to produce fast rise and fall times, short pulse widths, and high peak power pulses necessary for material processing applications.

Innovation Solution

A sealed-off, RF excited, diffusion cooled, high pressure, short pulsed, high peak power waveguide and slab CO2 laser system is developed, which maintains unsaturated gain and gas temperature at higher pressures by increasing pump energy and using additional cooling techniques, such as reducing wave-guiding wall separation and employing BeO ceramic for thermal conductivity, while encapsulating electrodes in dielectics to prevent corona and arcs.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If gas pressure is increased above 150 Torr to achieve faster rise and fall times and higher peak power pulses, then laser output performance is improved, but corona ionization and arcs occur in the discharge

Engineering Contradiction:
Improvepeak power pulsesVSAvoidcorona ionization
Core Design Contradiction:
PowerVSObject-affected harmful factors

Solution Approach 1:

A dielectric material is introduced as an intermediary between the RF electrode and the laser gas mixture. This dielectric layer prevents direct contact between the high-voltage electrode and the gas, thereby eliminating corona ionization while allowing the electric field to still excite the gas molecules for laser generation. The dielectric acts as a mediator that decouples the harmful corona effect from the useful laser excitation process.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention changes the electrical parameters at the electrode-gas interface by introducing a dielectric layer with specific permittivity and breakdown characteristics. This parameter change allows the system to operate at high gas pressures (above 150 Torr) without experiencing corona discharge, as the dielectric modifies the electric field distribution and prevents field emission at the electrode surface.

Inventive Principle:
Principle #35Parameter changes

2Speed

If gas pressure is increased to achieve shorter pulse widths and faster rise times, then pulse characteristics are improved, but arcs and hot spots develop in the discharge

Engineering Contradiction:
Improverise and fall timesVSAvoiddischarge uniformity
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The dielectric material serves as a mediator that smooths the electric field distribution along the electrode surface. By preventing direct field emission and corona effects, the dielectric layer ensures more uniform energy deposition in the gas, eliminating hot spots and arcs while maintaining the fast temporal characteristics required for short pulse widths and rapid rise times.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Power

If RF electric field strength is increased to generate discharge at higher gas pressures, then laser output power is improved, but corona ionization becomes more severe

Engineering Contradiction:
Improvelaser output powerVSAvoidcorona power loss
Core Design Contradiction:
PowerVSLoss of energy

Solution Approach 1:

The dielectric layer acts as an energy-efficient intermediary by preventing the formation of corona discharge. This eliminates the parasitic power losses associated with corona ionization while still allowing the RF electric field to effectively excite the laser gas molecules. The result is improved laser output power efficiency, as more of the input RF power is converted to useful laser radiation rather than being lost to corona effects.

Inventive Principle:
Principle #24Intermediary (Mediator)

4Adaptability or versatility

If gas pressure is increased to achieve better frequency tuning capability, then adaptability is improved, but discharge stability deteriorates due to corona and arcs

Engineering Contradiction:
Improvefrequency tuning capabilityVSAvoiddischarge stability
Core Design Contradiction:
Adaptability or versatilityVSStability of the object's composition

Solution Approach 1:

The dielectric material provides a stable interface between the RF electrode and the laser gas, enabling reliable operation at high gas pressures where frequency tuning capability is enhanced. By preventing corona ionization and arcs, the dielectric layer ensures discharge stability is maintained even at pressures that provide broader gain line-width for frequency tuning applications.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system achieves fast rise and fall times, short pulse widths, and high peak power pulses, enabling efficient operation at pressures up to atmosphere, with pulse energies up to 30 mJ and repetition rates of 10 KHz, suitable for material processing and remote sensing applications, while maintaining laser efficiency and stability.

Implementation Method 1

RF excited, sealed-off, diffusion cooled CO2 lasers

Methodology Applied
Scientific EffectRF excitation: Electromagnetic Induction

Implementation Method 2

CO2 lasers that operate at higher gas pressure can generate output pulses with faster rise and fall times

Methodology Applied
Scientific EffectStimulated emission: Laser

Implementation Method 3

diffusion cooled CO2 lasers

Methodology Applied
Scientific EffectDiffusion cooling: Diffusion

Implementation Method 4

employing BeO ceramic for thermal conductivity

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 5

the inductors contained within the gas plenum chamber that contains the discharge along with the laser resonator. The inductors are used to equalize the RF electric field along the length of the electrode

Methodology Applied
Scientific EffectCorona ionization: Corona Discharge

Data Source

PatentUS7453918B2Pulsed RF high pressure CO<sub>2 </sub>lasers
Publication Date: 2008.11.18 COHERENT INC
  • US7453918B2 patent drawing
  • US7453918B2 patent drawing
  • US7453918B2 patent drawing

AI summary

An improved laser system includes a sealed-off, RF excited, diffusion cooled, high pressure, short pulsed, high peak power waveguide and slab CO2 laser that avoids problems typically associated with obtaining a diffused discharge at high gas pressures, without arcing and without corona, while maintaining the unsaturated gain and gas temperature experienced at low pressures and scaling to higher pressures. Such a system has a long operating life-time, and is capable of operation at high gas pressures to obtain relative fast rise and fall time pulses. The system emits relatively short pulse widths, with pulse energies up to and exceeding 30 mJ, with reasonably high pulse repetition rates. The system also has a low pulsed RF power duty cycle, thereby enabling the generation of high peak power pulses, as well as reasonable average power and reasonably high peak powers.