CO2 Laser Amplifier Pulse Shaping for Stable Gain

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Solution Overview

Problem

Existing laser amplification devices face a reduction in amplification factor due to the short pulse width of laser light entering the amplifier, which is affected by the rotational relaxation of the laser medium.

Innovation Solution

A laser amplification device is designed with a laser oscillator that emits pulsed laser light with a full width at half maximum of between 15 ns to 200 ns, and a laser amplifier that uses a mixed gas containing carbon dioxide to shorten the pulse width to between 5 ns and 30 ns.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Duration of action of moving object

If laser light with short pulse width enters the amplifier, then the pulse width is suitable for certain applications, but the amplification factor is reduced due to rotational relaxation of the laser medium

Engineering Contradiction:
Improvepulse widthVSAvoidamplification factor
Core Design Contradiction:
Duration of action of moving objectVSReliability

Solution Approach 1:

The patent applies preliminary action by generating laser light with an extended pulse width (15-200 ns) at the oscillator stage before amplification. This preliminary extension of pulse width prevents the rotational relaxation effect from reducing the amplification factor in the amplifier, while still achieving the desired short pulse width (5-30 ns) at the final output through controlled amplification processes.

Inventive Principle:
Principle #10Preliminary action

2Reliability

If the pulse width of laser light is extended at the oscillator, then the amplification factor is maintained, but the output pulse width must be shortened for high-power extreme ultraviolet light generation

Engineering Contradiction:
Improveamplification factorVSAvoidoutput pulse width
Core Design Contradiction:
ReliabilityVSDuration of action of moving object

Solution Approach 1:

The patent employs dynamics by implementing a two-stage laser system where the pulse width is dynamically adjusted at different stages. The oscillator generates light with extended pulse width (15-200 ns) to maintain amplification factor, while the amplifier system dynamically processes this light to produce the final short pulse width (5-30 ns) output required for high-power extreme ultraviolet light generation.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration prevents a reduction in amplification factor and enables the generation of high-power extreme ultraviolet light by optimizing the pulse width and amplification process.

Implementation Method 1

a first laser active medium including a mixed gas containing carbon dioxide gas to emit pulsed laser light

Methodology Applied
Scientific EffectStimulated emission: Laser

Implementation Method 2

laser light entering an amplifier has a short pulse width and thus is affected by the rotational relaxation of a laser medium

Methodology Applied
Scientific EffectRotational relaxation:

Implementation Method 3

a laser amplifier including a second laser active medium including a mixed gas containing carbon dioxide gas through which the pulsed laser light emitted from the laser oscillator passes to be shortened

Methodology Applied
Scientific EffectLight amplification: Laser

Data Source

PatentUS12230936B2Laser amplification device and extreme ultraviolet light generation apparatus
Publication Date: 2025.02.18 MITSUBISHI ELECTRIC CORP
  • US12230936B2 patent drawing
  • US12230936B2 patent drawing
  • US12230936B2 patent drawing

AI summary

A laser amplification device includes a laser oscillator that includes a first laser active medium including a mixed gas containing carbon dioxide gas and emits pulsed laser light with the full width at half maximum of between 15 ns to 200 ns, and a laser amplifier that includes a second laser active medium including a mixed gas containing carbon dioxide gas through which the pulsed laser light emitted from the laser oscillator passes to be shortened to pulsed laser light with the full width at half maximum of between 5 ns and 30 ns to be output.