CO2 and NOx Abatement via Amine Reduction Tower
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Solution Overview
Problem
Semiconductor manufacturing processes generate hazardous emissions that include carbon dioxide and nitrogen oxides, which are not effectively mitigated by conventional abatement systems, leading to environmental concerns.
Innovation Solution
A system comprising an abatement apparatus with a condenser to reduce water vapor and a reduction tower that uses a catalytic chemical reaction with an amine solution to absorb pollutants, including carbon dioxide and nitrogen oxides, followed by thermal desorption to yield an exhaust substantially free of these pollutants.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If conventional abatement systems are used to remove hazardous gas species, then the abatement process operates, but carbon dioxide and nitrogen oxides emissions are not effectively mitigated
Solution Approach 1:
The system changes the chemical state of CO2 and NOx by introducing reducing agents (ammonia or hydrocarbons) that transform these stable oxidized gases into reducible intermediates through controlled combustion, enabling subsequent selective catalytic reduction to convert them into harmless nitrogen and water vapor
Solution Approach 2:
The patent introduces intermediary substances (reducing agents such as ammonia or hydrocarbons) that mediate the conversion of CO2 and NOx into forms that can be more effectively reduced and removed by the catalytic converter, acting as a bridge between the abatement system and the target pollutants
2Duration of action of stationary object
If abatement systems operate continuously, then emissions are treated, but flow blockages occur reducing system lifespan
Solution Approach 1:
The system extracts and removes particulate matter and condensed hydrocarbons from the exhaust stream through filtration and condensation processes before they can accumulate and cause blockages, continuously clearing the flow path to maintain system operation
Solution Approach 2:
The system performs preliminary removal of particulates and condensable substances through filters and condensers before the exhaust reaches points where blockages could occur, preventing the formation of obstructing deposits in advance
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively reduces carbon dioxide and nitrogen oxide emissions, improving operational efficiency and extending the lifespan of abatement systems by enhancing particulate filtration and preventing flow blockages.
Implementation Method 1
a condenser coupled to the abatement apparatus and configured to reduce water vapor of the emission stream
Implementation Method 2
a reduction tower coupled to the condenser, where the reduction tower includes: a reduction chamber having an inlet coupled to an outlet of the condenser, and a nozzle disposed within the reduction chamber and configured to dispense a solution therein, which catalyzes a chemical reaction to absorb a pollutant from the effluent
Implementation Method 3
a nozzle disposed within the reduction chamber and configured to dispense a solution therein, which catalyzes a chemical reaction
Implementation Method 4
an exchanger coupled to the reduction tower, wherein the exchanger comprises an exchange chamber including an inlet fluidly coupled to an outlet of the reduction tower, a hot plate disposed within the exchange chamber and configured to catalyze thermal desorption of the pollutant from the amine solution
Data Source
AI summary
A system to abate an emission stream from a semiconductor manufacturing process is disclosed. The system includes an abatement apparatus, such as a gas scrubber, to remove hazardous and toxic gas species from the emission stream and to yield an emission having carbon dioxide. The system condenses the emission having carbon dioxide to an effluent, and transmits the effluent through a reduction tower. The reduction tower catalyzes a chemical reaction which absorbs carbon dioxide from the effluent using a solution and yields an exhaust substantially free of carbon dioxide. The reduction tower is coupled to an exchanger which catalyzes a thermogenic reaction to release absorbed carbon dioxide from the solution. The system may include a closed-loop system that transmits solution substantially free of carbon dioxide from the exchanger and through the reduction tower to absorb carbon dioxide from additional effluent.