CO2 Particle Detection for Sub-100nm Surface Analysis
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Solution Overview
Problem
Current surface particle detection methods in the semiconductor industry are ineffective in detecting particles smaller than 100 nm and fail to provide accurate composition and distribution analysis, leading to contamination and yield loss in semiconductor manufacturing.
Innovation Solution
A method involving a stream of solid CO2 particles or CO2 droplets is directed at the surface of components to dislodge particles, which are then collected and analyzed for size, morphology, chemical composition, and distribution using a substrate or real-time aerosol sampling components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If liquid particle counters (LPCs) are used to detect surface particles, then the detection process is simple, but particles smaller than 100 nm cannot be detected efficiently and cross contamination is introduced
Solution Approach 1:
The patent replaces the mechanical liquid particle counter system with a gas-phase particle detection system using CO2. The CO2 stream transports dislodged particles through a vacuum interface to a detector, eliminating the need for liquid handling and enabling detection of sub-100nm particles without cross-contamination.
Solution Approach 2:
The patent introduces CO2 gas as an intermediary medium to dislodge and transport particles from surfaces. The CO2 stream acts as a mediator between the particle source and detector, enabling particle transport without direct contact that would cause contamination.
2Object-affected harmful factors
If sniffing techniques with gentle air flow are used to dislodge particles, then the process is non-invasive, but particles smaller than 100 nm cannot be effectively dislodged
Solution Approach 1:
The patent changes the parameters of the gas stream by using CO2 at controlled pressure and flow rates. The CO2 stream can be tuned to provide sufficient force to dislodge sub-100nm particles while remaining non-invasive to the surface, overcoming the limitation of gentle air flow.
Solution Approach 2:
The patent utilizes the phase transition properties of CO2. CO2 can transition between gas and liquid phases, allowing the system to use liquid CO2 for cleaning (non-invasive) and gas-phase CO2 for particle transport and detection, optimizing both surface protection and particle dislodging.
3Device complexity
If standard detection methods are used, then the equipment is simple, but accurate composition and distribution analysis cannot be provided
Solution Approach 1:
The patent combines multiple detection capabilities into a single integrated system. The CO2-based particle transport system is merged with mass spectrometry or other compositional analysis tools, allowing simultaneous detection of particle size, composition, and distribution without requiring multiple separate instruments.
Solution Approach 2:
The patent creates a universal particle analysis platform that can perform multiple functions: particle dislodgment, transport, size detection, and compositional analysis. This multi-functional system eliminates the need for separate simple detectors and provides comprehensive particle characterization.
4Ease of manufacture
If LPCs are used for surface particle analysis, then the method is straightforward, but cross contamination from liquid is introduced
Solution Approach 1:
The patent replaces the liquid-based mechanical particle counter system with a gas-phase system using CO2. This substitution eliminates cross-contamination from liquids while maintaining operational simplicity through automated CO2 stream control and particle transport.
Solution Approach 2:
The patent uses CO2 gas to create an inert atmosphere during particle detection. CO2 is chemically inert and does not contaminate the particles or the detection environment, eliminating cross-contamination issues associated with liquid solvents while keeping the method straightforward.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables accurate detection and analysis of surface particles, including those smaller than 100 nm, reducing contamination and yield loss by providing detailed metrology for improved manufacturing control.
Implementation Method 1
The stream including solid CO2 particles and/or CO2 droplets causes a portion of the surface particles on the article to dislodge from the surface of the article and become airborne
Implementation Method 2
A portion of these surface particles may then be collected on a surface of a substrate
Data Source
AI summary
A processing device of a particle detection system causes a distribution unit of the particle detection system to initiate a particle collection process to dislodge surface particles from a surface of an article based on a stream including solid carbon dioxide (CO2) particles and/or CO2 droplets directed toward the article. A portion of the dislodged surface particles are collected by a particle sampling component that determines, for collected particles and in real-time, a particle number concentration, a particle size, and/or a particle size distribution. A determination is made based on a signal received by the particle sampling component that the at least one of the particle number concentration, the particle size, or the particle size distribution of the portion of the dislodged surface particles satisfies one or more collection criteria. The processing device causes the distribution unit of the particle detection system to terminate the particle collection process.