Coated Active Cantilever Probes for Opaque Liquid AFM

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Solution Overview

Problem

Conventional Atomic Force Microscopes (AFMs) are limited in their ability to perform topography imaging in opaque and chemically harsh environments due to the requirement of optical transparency and the need for light sources, which restricts their application in environments like crude oil and whole blood, where optical systems cannot operate effectively.

Innovation Solution

Active cantilever probes with a thin, thermally conductive coating that protects the probe components from harsh conditions, allowing for topography imaging without light sources or optical systems, and maintaining the probe's mechanical properties and resonance frequency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional AFM with Optical Beam Deflection system is used, then topography imaging can be performed with sub-nanometer resolution, but the system cannot operate in opaque liquid environments

Engineering Contradiction:
Improvetopography measurement resolutionVSAvoidenvironmental adaptability
Core Design Contradiction:
Measurement precisionVSAdaptability or versatility

Solution Approach 1:

The patent replaces the optical detection system with a mechanical detection system. A piezoresistive sensor is integrated directly onto the cantilever substrate to detect deflection through resistance changes, eliminating the need for optical components and enabling operation in opaque environments while maintaining measurement precision.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The cantilever substrate is designed to serve multiple functions: it acts as both the mechanical probe for topography scanning and as the substrate for integrating the piezoresistive sensor. This multi-functionality allows the same component to enable both precise measurement and environmental versatility.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Reliability

If a coating is applied to protect the piezoresistive sensor from harsh chemicals, then chemical resistance is improved, but the coating may affect the sensor's electrical properties and measurement accuracy

Engineering Contradiction:
Improvechemical resistanceVSAvoiddeflection measurement accuracy
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

A thin film coating is applied over the piezoresistive sensor to provide chemical protection. The coating is designed to be sufficiently thin and compliant to allow mechanical deflection of the cantilever to be transmitted to the sensor while protecting the underlying components from harsh chemical environments.

Inventive Principle:
Principle #30Flexible shells and thin films

Solution Approach 2:

The coating is selectively applied to specific regions of the cantilever substrate, particularly covering the piezoresistive sensor areas that require protection, while maintaining local mechanical properties and electrical functionality where needed.

Inventive Principle:
Principle #3Local quality

3Measurement precision

If the cantilever substrate is made very thin to improve resolution, then topography imaging precision is improved, but the substrate becomes more vulnerable to damage in harsh environments

Engineering Contradiction:
Improvetopography imaging resolutionVSAvoidsubstrate durability
Core Design Contradiction:
Measurement precisionVSStrength

Solution Approach 1:

The cantilever system employs a composite structure combining a thin cantilever substrate for high resolution with a protective coating layer for durability. This composite design allows the thin substrate to maintain its flexibility and resolution capability while the coating provides environmental protection and mechanical strength.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables topography imaging in opaque and chemically harsh environments, such as crude oil and whole blood, without compromising the probe's performance, by providing a protective coating that maintains the probe's mechanical integrity and resonance frequency, thus expanding the applicability of AFMs in previously inaccessible environments.

Implementation Method 1

a piezoresistive stress sensor disposed on the cantilever at the base region and configured to measure deflection of the cantilever at the tip region

Methodology Applied
Scientific EffectPiezoresistive effect: Piezoresistive Effect

Implementation Method 2

a thermomechanical actuator associated with the cantilever and configured to cause the cantilever to deflect

Methodology Applied
Scientific EffectThermomechanical effect: Thermomechanical Effect

Implementation Method 3

the coating being bonded to the substrate, thermally conductive, and having a low thermal resistance

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS11906546B2Coated active cantilever probes for use in topography imaging in opaque liquid environments, and methods of performing topography imaging
Publication Date: 2024.02.20 SYNFUEL AMERICAS CORP
  • US11906546B2 patent drawing
  • US11906546B2 patent drawing
  • US11906546B2 patent drawing

AI summary

Active cantilever probes having a thin coating incorporated into their design are disclosed. The probes can be operated in opaque and/or chemically harsh environments without the need of a light source or optical system and without being significantly negatively impacted by corrosion. The probes include a substrate that has a cantilever, a thermomechanical actuator associated with the cantilever, a piezoresistive stress sensor disposed on the cantilever, and a thin coating disposed on the cantilever and the piezoresistive stress sensor. The coating is bonded to the substrate, is thermally conductive, and has a low thermal resistance. Further, the thin coating is configured to have little to no impact on one or more of a mass of the active probe, a residual stress of the cantilever, or a stiffness of the active probe. Techniques for performing topography and making other measurements in an opaque and/or chemically harsh environment are also provided.