Coated Container Preventing Impurity Elution in Semiconductor Chemical Storage
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Solution Overview
Problem
Existing containers used in semiconductor manufacturing are insufficient for storing chemical liquids with high purity, as they allow impurity components to elute over time, leading to deterioration of the chemical liquid's performance.
Innovation Solution
A container with a coating layer composed of a polyolefin and specific metal components (Ti, Al, Mg, Zr, Hf, Fe, Ni, Sn, Zn, Cr, and Mo) is developed, where the metal component distribution is controlled to ensure a lower intensity ratio in the surface region compared to the internal region, preventing impurity elution and maintaining chemical liquid performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a container is used to store chemical liquids, then the chemical liquid can be stored, but impurity components elute from the container over time, causing deterioration of the chemical liquid's performance
Solution Approach 1:
The coating layer is designed with non-uniform metal component distribution, where the surface region has a lower intensity ratio (CA1s/CA2s < 1.00) compared to the internal region. This local quality variation prevents impurity elution at the surface while maintaining structural integrity from the internal metal components, thereby preventing chemical liquid deterioration without sacrificing container reliability
Solution Approach 2:
The container employs a composite structure consisting of a base material and a coating layer containing polyolefin and specific metal components (Ti, Al, Mg, Zr, Hf, Fe, Ni, Sn, Zn, Cr, or Mo). This composite material structure combines the chemical resistance of polyolefin with the protective properties of metal components, preventing impurity elution while maintaining container reliability for storing chemical liquids
2Object-generated harmful factors
If a coating layer with metal components is added to the container, then impurity elution is prevented, but the manufacturing complexity increases due to precise control of metal component distribution
Solution Approach 1:
The invention controls the distribution of metal components by managing the intensity ratio parameter (CA1s/CA2s) in the coating layer. By adjusting this parameter to be less than 1.00 in the surface region, the patent achieves effective prevention of impurity elution while maintaining a manageable coating structure that does not excessively increase manufacturing complexity
Data Source
AI summary
A container has a base material and a coating layer which is disposed on at least a portion of the base material, contains a composition containing at least one kind of metal component selected from the group consisting of Ti, Al, Mg, Zr, Hf, Fe, Ni, Sn, Zn, Cr, and Mo, and has a thickness equal to or greater than 50 μm. In a case where the composition contains one kind of metal component, a ratio RCAs calculated by CA1s/CA2s is less than 1.0. Alternatively, in a case where the composition contains two or more kinds of metal components, in at least a portion of the coating layer, an average of RCAs determined for each of two or more kinds of the metal components is less than 1.0.