Coated Stainless Steel Foreline for Longer-Lived Cleaning Radicals
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Solution Overview
Problem
Conventional foreline cleaning methods in semiconductor manufacturing are inefficient due to the rapid loss of excitation state of cleaning gases, leading to ineffective removal of deposits and potential damage to downstream equipment.
Innovation Solution
A stainless steel foreline with an inner coating of aluminum oxide or aluminum, having a thickness of 150 to 525 nanometers, reduces the recombination of oxygen radicals with the stainless steel surface, maintaining the excitation state of cleaning gases and enhancing the cleaning efficacy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If conventional cleaning methods using excited cleaning gases are used in the foreline, then cleaning action is provided, but the excitation state of the cleaning gases is rapidly lost resulting in inefficient deposition removal
Solution Approach 1:
A coating layer is applied to the inner surface of the foreline to act as an intermediary between the cleaning gases and the stainless steel wall. This coating prevents direct interaction that causes rapid deactivation of cleaning gas radicals, thereby extending their lifespan and maintaining cleaning effectiveness throughout the foreline.
Solution Approach 2:
The invention changes the surface properties of the foreline by applying a coating with different chemical and physical characteristics than stainless steel. This parameter change reduces the recombination rate of cleaning gas radicals with the wall surface, extending their active lifespan and improving overall cleaning efficiency.
2Productivity
If no coating is applied to the foreline, then the structure remains simple, but deposits form on the stainless steel surface reducing exhaust system performance
Solution Approach 1:
The foreline is transformed from a single-material stainless steel structure to a composite structure with an inner coating layer and outer stainless steel shell. This composite design combines the structural integrity of stainless steel with the low-deposition properties of the coating material, improving exhaust performance while adding controlled complexity.
3Reliability
If the foreline stainless steel surface directly contacts cleaning gases, then no additional coating is needed, but the cleaning gases recombine rapidly with the steel surface losing their excitation state
Solution Approach 1:
The coating serves as a mediator that allows cleaning gases to maintain their excitation state longer by preventing direct recombination with the stainless steel surface. This intermediary layer preserves the chemical reactivity of cleaning gases, improving cleaning reliability throughout the foreline length.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The coating extends the lifespan of cleaning gases, improves the uniformity of deposition removal, reduces the frequency of cleaning cycles, and decreases equipment damage, thereby increasing efficiency and safety while lowering operational costs.
Implementation Method 1
The coating reduces the recombination of oxygen radicals with the stainless steel surface
Implementation Method 2
The coating extends the lifespan of cleaning gases
Implementation Method 3
etching deposits as the radicals flow through the foreline
Data Source
AI summary
A component, system, and method for improved foreline cleaning of semiconductor chambers and components are disclosed herein. In one example, a processing chamber component includes a foreline constructed from stainless steel having a circular cross sectional shape and an inner surface. The foreline further includes a first end configured to couple to a processing chamber, a second end configured to couple to a valve, and a coating disposed within the inner surface of the foreline, the coating having a thickness between about 150 nanometers and about 525 nanometer. Further, the first end includes a first flange, the second end comprises a second flange, wherein the first end and the second end are coupled by a bend. Further, the coating has properties configured to reduce depositions within the foreline.