Coated Nanoparticles for Passive Electronics via ALD

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Solution Overview

Problem

Batch processes for coating nanoparticles in vapor deposition techniques face inefficiencies due to large equipment costs, difficulty in maintaining uniform reaction conditions, and limitations in throughput, leading to inconsistencies and defects in coated products, which hinder the integration of these processes at an industrial scale.

Innovation Solution

The development of thin film coated nanoparticles using atomic layer deposition (ALD) or molecular layer deposition (MLD) processes, which apply a thin film of oxidation-resistant or reliability-improving materials to nanoparticles, enhancing their performance and lifespan without significant additional resistivity or affecting sintering, and allowing for continuous or semi-continuous operation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If batch processes are used for coating nanoparticles in vapor deposition techniques, then coating can be applied to nanoparticles, but equipment costs are large and throughput is limited leading to inconsistencies and defects

Engineering Contradiction:
Improvecoating consistencyVSAvoidthroughput
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent applies preliminary action by pre-coating nanoparticles with a first material layer before applying the second material layer. This sequential preparation ensures that each layer is properly formed and stabilized before the next coating step, preventing defects and inconsistencies that would arise from attempting to apply multiple materials simultaneously or in reverse order.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent implements continuity of useful action by maintaining continuous coating operations without interrupting the vapor deposition process. The system keeps the coating apparatus operating continuously, applying different material layers in sequence without stopping, which eliminates the inconsistencies and defects associated with batch processes while maintaining high throughput.

Inventive Principle:
Principle #20Continuity of useful action

2Manufacturing precision

If batch processes are used for coating nanoparticles, then coating can be applied, but equipment costs are large and uniform reaction conditions are difficult to maintain

Engineering Contradiction:
Improvecoating uniformityVSAvoidequipment cost
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent applies segmentation by dividing the coating process into distinct sequential steps: first applying a coating of a first material, then applying a coating of a second material. This segmentation allows each material layer to be deposited under optimized conditions independently, ensuring uniform coating quality without requiring overly complex equipment.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent utilizes parameter changes by varying deposition parameters between the first and second material coating steps. By adjusting variables such as deposition rate, temperature, or precursor flow rates between layers, the process achieves uniform coating quality while using standard equipment rather than expensive specialized apparatus.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The thin film coatings significantly improve the performance and lifespan of passive electronic components by at least 10-100% and mean time to failure by 20-200% compared to uncoated nanoparticles, while maintaining electrical conductivity and preventing oxidation, thus addressing the inefficiencies of batch processes.

Implementation Method 1

The thin film coating can be an oxidation-resistant material or a reliability-improving material

Methodology Applied
Scientific EffectOxidation resistance: Oxidation

Implementation Method 2

The development of thin film coated nanoparticles using atomic layer deposition (ALD) or molecular layer deposition (MLD) processes

Methodology Applied
Scientific EffectAtomic layer deposition: Physical Vapour Deposition

Data Source

PatentUS10081865B2Passive electronics components comprising coated nanoparticles and methods for producing and using the same
Publication Date: 2018.09.25 FORGE NANO INC
  • US10081865B2 patent drawing
  • US10081865B2 patent drawing
  • US10081865B2 patent drawing

AI summary

The present invention provides various passive electronic components comprising a layer of coated nanoparticles, and methods for producing and using the same. Some of the passive electronic components of the invention include, but are not limited to conductors, resistors, capacitors, piezoelectronic devices, inductors and transformers.