Coated Film-Forming Nozzle for Low-Contamination Deposition
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Solution Overview
Problem
Conventional film-forming apparatuses suffer from impurity contamination and abnormal growth due to nozzle components dissolving into the raw material mist, leading to degraded film quality and precipitate formation.
Innovation Solution
A film-forming nozzle with a coating made of a material different from its base material, covering the inner surface of the flow path to prevent contact between the gas mixture and the nozzle components, and a temperature adjustment part to manage heat and evaporation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional nozzle is used without coating, then the structure is simple and easy to manufacture, but the nozzle components dissolve into the raw material mist causing impurity contamination and degraded film quality
Solution Approach 1:
The nozzle is constructed with a base material (e.g., metal) and a coating layer made of different material (e.g., resin or ceramic). This composite structure allows the base material to provide mechanical strength while the coating prevents chemical interaction with the raw material mist, eliminating impurity contamination without complicating the overall nozzle design.
Solution Approach 2:
A coating layer is introduced as an intermediary between the nozzle base material and the raw material mist. This coating acts as a barrier that prevents direct contact and dissolution, thereby protecting the film quality without requiring changes to the fundamental nozzle structure or material.
2Manufacturing precision
If the nozzle is heated by a heat source, then film-forming can be conducted, but the evaporation of raw material mist progresses inside the nozzle causing droplet concentration and abnormal growth
Solution Approach 1:
The coating layer serves as a thermal barrier between the heated nozzle base material and the raw material mist. It allows controlled heat transfer sufficient for film-forming while preventing excessive temperature rise that would cause mist evaporation and droplet concentration, thereby maintaining film uniformity.
Solution Approach 2:
The coating material is selected to have specific thermal properties that modify the temperature distribution within the nozzle. By changing the thermal conductivity parameter of the nozzle structure through coating, the temperature is maintained within an optimal range that enables film-forming without causing mist evaporation.
3Reliability
If the nozzle components contact the raw material mist, then the structure is simple, but the components elute into the mist forming precipitates that adhere to the film and cause abnormal growth
Solution Approach 1:
The nozzle uses a composite structure with a base material and a chemically inert coating. This combination maintains structural simplicity and reliability while the coating prevents chemical dissolution and impurity formation, ensuring stable manufacturing of high-quality films.
Solution Approach 2:
The coating layer acts as a protective intermediary that prevents direct chemical interaction between the nozzle base material and the raw material mist. This eliminates component elution and precipitate formation, ensuring reliable and stable film manufacturing without complicating the nozzle design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Stable production of high-quality films with reduced impurity contamination and abnormal growth by preventing nozzle components from eluting into the raw material mist and controlling temperature.
Implementation Method 1
an inner surface of a flow path of the gas mixture from the supply port to the discharge port of the film-forming nozzle is covered with a coating made of a material different from a base material forming a basic structure of the film-forming nozzle
Implementation Method 2
the film-forming nozzle is preferably equipped with a temperature adjustment part for adjusting a temperature of the film-forming nozzle
Implementation Method 3
the evaporation of the raw material mist progresses inside the nozzle, causing the droplets to concentrate
Data Source
Figure 1~3
Figure 4
AI summary
The present invention is a film-forming nozzle wherein: the film-forming nozzle supplies a gas mixture to a substrate surface, the gas mixture including a carrier gas and a raw material mist obtained by atomizing a liquid raw material; and includes a supply port into which the gas mixture flows, and a discharge port spatially connected to the supply port and from which the gas mixture flows out; and an inner surface of a flow path of the gas mixture from the supply port to the discharge port of the film-forming nozzle is covered with a coating made of a material different from a base material forming a basic structure of the film-forming nozzle. This provides a film-forming nozzle and a film-forming apparatus that can stably produce high-quality films with significantly reduced impurity contamination, foreign matter (particle) adhesion, and abnormal growth.