Dual-Layer Coated Substrate Support for Corrosion Resistance
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Solution Overview
Problem
Conventional substrate supports are susceptible to corrosion from preclean process gases, leading to substrate defect formation and back side metal contamination during semiconductor processing.
Innovation Solution
A substrate support assembly with a two-part coating system, comprising a first metal-containing or alloy coating layer and a second non-metal or reduced-metal coating layer, which protects the support body from corrosion and reduces metal contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional substrate support is used during preclean processing, then the support structure remains simple and cost-effective, but the support becomes corroded by process gases causing substrate defects and metal contamination
Solution Approach 1:
The coating is divided into multiple distinct layers, each performing a specific function: the first layer provides corrosion resistance against process gases, while the second layer prevents metal contamination and promotes oxide removal. This segmentation allows each layer to be optimized for its specific purpose without compromising the other functions.
Solution Approach 2:
The patent applies a composite coating structure combining different materials with complementary properties. The first layer uses materials resistant to chemical corrosion from preclean gases, while the second layer uses materials that prevent metal contamination and facilitate selective oxide removal. This composite approach resolves the contradiction by integrating multiple material properties into a single coating system.
2Manufacturing precision
If preclean process gases are used to remove oxide layers and contaminants, then substrate surface quality is improved, but the substrate support becomes corroded causing defects and contamination
Solution Approach 1:
The dual-layer coating acts as an intermediary barrier between the preclean process gases and the substrate support. The first layer resists corrosion from the process gases, while the second layer prevents metal contamination from reaching the substrate. This intermediary coating system allows the preclean process to effectively improve substrate surface quality without generating harmful corrosion and contamination from the support.
3Productivity
If a single-layer coating is applied to the substrate support, then the coating application process is simple and fast, but the coating cannot simultaneously provide corrosion resistance and prevent metal contamination
Solution Approach 1:
The coating system is segmented into two functional layers applied in sequence. The first layer is optimized for corrosion resistance and can be applied using standard techniques, while the second layer provides contamination prevention and oxide removal capabilities. This segmentation maintains reasonable application efficiency while achieving multi-functionality that a single-layer coating cannot provide.
Solution Approach 2:
The dual-layer coating system achieves multi-functionality by combining layers with complementary properties. The first layer handles corrosion resistance, while the second layer provides contamination prevention and oxide removal. Together, they create a universal coating system that performs multiple critical functions simultaneously, resolving the contradiction between application simplicity and functional versatility.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The two-part coating system effectively minimizes substrate defect formation and back side metal contamination by providing enhanced corrosion resistance and selective oxide removal, improving the quality of subsequently formed epitaxial layers.
Implementation Method 1
depositing a first material over an outer surface of the support body, thereby forming a first coating layer
Implementation Method 2
depositing a first material over an outer surface of the support body, thereby forming a first coating layer
Implementation Method 3
depositing a second material over at least a portion of the first coating layer disposed over the top surface of the support body, thereby forming a second coating layer
Implementation Method 4
depositing a second material over at least a portion of the first coating layer disposed over the top surface of the support body, thereby forming a second coating layer
Data Source
AI summary
An embodiment of a method includes placing a substrate on a substrate support assembly that is at least partially positioned in a processing chamber. The substrate support assembly includes a body having an outer surface and an outer coating layer disposed at least partially over the outer surface, the outer coating layer comprising yttrium fluoride (YF3). In addition, the method includes contacting a surface of the substrate with a process gas in the processing chamber at a process temperature that is about 40° C. or less to remove oxides from the surface.