Multilayer Coated Tray Recess for Stable Substrate Fixing
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Solution Overview
Problem
Existing substrate fixing devices face challenges in securely accommodating substrates due to the formation of R-shaped edges in the recesses, leading to substrate movement and inclination during transfer, which prevents effective suction.
Innovation Solution
A tray with an accommodation recess featuring a coating film layer having a multilayer structure, including a first coating film with higher plasma resistance and a second coating film, which penetrates the coating film layer in the thickness direction, preventing the formation of R-shaped edges and ensuring proper substrate fixation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Shape
If the opening diameter of the recess is increased to accommodate the R-shaped bottom portion, then the substrate can be accommodated, but the substrate moves in the recess during transfer
Solution Approach 1:
The invention changes the geometric parameters of the recess by replacing the R-shaped bottom with a flat bottom configuration. This parameter change allows the opening diameter to be reduced while maintaining adequate substrate accommodation, thereby preventing substrate movement during transfer operations.
Solution Approach 2:
The invention eliminates the curved R-shaped bottom portion and replaces it with a flat bottom surface. This removal of curvature in the recess geometry prevents the substrate from tilting or moving, as the flat surface provides stable support across the entire substrate area.
2Shape
If the opening diameter of the recess is increased to accommodate the R-shaped bottom portion, then the substrate can be accommodated, but the substrate becomes inclined and cannot be sucked properly
Solution Approach 1:
The invention modifies the recess geometry parameters by creating a flat bottom configuration instead of an R-shaped bottom. This ensures the substrate sits flat and maintains proper contact with the suction surface, enabling reliable suction without requiring a larger opening diameter.
3Ease of manufacture
If a single-layer coating is used on the tray, then the manufacturing process is simple, but the plasma resistance is insufficient and the device lifespan is reduced
Solution Approach 1:
The invention applies a multilayer coating structure consisting of different material layers with complementary properties. The first layer provides plasma resistance, while the second layer enhances adhesion to the tray substrate. This composite coating approach extends device lifespan while maintaining manufacturing feasibility through established coating processes.
Solution Approach 2:
The coating is divided into multiple functional layers, with each layer serving a specific purpose. The first coating layer addresses plasma resistance requirements, while the second coating layer addresses adhesion requirements. This segmentation of functionality allows each layer to be optimized for its specific role, extending overall device durability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents substrate movement and inclination, ensuring suitable fixation and reducing the need for larger opening diameters, thereby enhancing the operational efficiency of substrate fixing devices.
Implementation Method 1
The coating film layer has a multilayer structure including a first coating film having higher plasma resistance than the bottom plate portion and a second coating film laminated on an upper surface of the first coating film and having higher plasma resistance than the first coating film
Implementation Method 2
a substrate fixing device using an electrostatic chuck has been proposed
Data Source
AI summary
A tray mounted on an electrostatic chuck includes an accommodation recess configured to accommodate a substrate, a bottom plate portion placed on the electrostatic chuck, a coating film layer made of a material different from the bottom plate portion and formed on an upper surface of the bottom plate portion, and an opening portion penetrating the coating film layer in a thickness direction. The accommodation recess includes an inner side surface of the opening portion and an upper surface of the bottom plate portion exposed from the opening portion. The coating film layer has a multilayer structure including a first coating film having higher plasma resistance than the bottom plate portion and a second coating film laminated on an upper surface of the first coating film and having higher plasma resistance than the first coating film. The first coating film is thicker than the second coating film.