Coated Composite Wafer Structure for Break-Resistant Embossing

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Solution Overview

Problem

The embossing process for creating structures on wafers used in augmented reality glasses is prone to breaking the wafers due to high forces, leading to increased production costs and inefficiencies.

Innovation Solution

A composite workpiece with a substrate body having convex and concave surfaces and a coating on the convex surface, combined with a controlled bow and low compressive stress, enhances the substrate's resistance to embossing forces, using PVD coatings like TiO2 and ZrO2 to increase surface strength.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If embossing process is applied to create structures on wafers, then light or image guidance structures are formed, but wafers break due to high forces

Engineering Contradiction:
Improvestructure formation on waferVSAvoidwafer breakage
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The invention divides the wafer into two separate components: a substrate body and a coating layer. The substrate body provides mechanical strength and stability, while the coating layer receives the embossing structures. This segmentation allows each component to be optimized for its specific function, preventing wafer breakage during embossing.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention uses a composite structure consisting of a substrate body (made of glass or plastic) and a coating layer (made of different material). This composite material approach combines the advantages of both materials: the substrate provides structural integrity to withstand embossing forces, while the coating layer is suitable for receiving embossing structures and can be optimized for optical properties.

Inventive Principle:
Principle #40Composite materials

2Strength

If coating is applied to increase surface strength, then resistance to embossing forces improves, but substrate temperature must be controlled

Engineering Contradiction:
Improvesurface strengthVSAvoidsubstrate temperature control
Core Design Contradiction:
StrengthVSTemperature

Solution Approach 1:

The invention changes the temperature parameter during the coating application process, maintaining substrate temperature at or below 200°C. This parameter control ensures proper coating adhesion and prevents substrate damage while achieving the desired surface strength enhancement through the coating layer.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The composite workpiece significantly reduces the risk of breakage during embossing, enabling a more efficient, reliable, and higher-quality production of augmented reality glasses with improved structural integrity.

Implementation Method 1

using PVD coatings like TiO2 and ZrO2 to increase surface strength

Methodology Applied
Scientific EffectPhysical Vapour Deposition: Physical Vapour Deposition

Data Source

PatentUS12492143B2Composite workpiece, method of manufacturing, device and use of such a composite workpiece
Publication Date: 2025.12.09 SCHOTT AG
  • US12492143B2 patent drawing
  • US12492143B2 patent drawing

AI summary

At least one composite workpiece includes: a substrate body including at least one first surface and at least one second surface, the at least one first surface of the substrate body being shaped convexly at least in areas and the at least one second surface of the substrate body being shaped concavely at least in areas, and the at least one composite workpiece has a bow with an absolute value of between 0.1 μm and 50 μm due to the curved shape of the at least one first surface and the at least one second surface; and at least one first coating, at least the at least one first surface of the substrate body being coated at least in areas with the first coating.