Coater Developer Module Count Optimization

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Solution Overview

Problem

In coater/developer systems for semiconductor and LCD wafer fabrication, the existing methods lead to waste of electricity and increased running costs due to unnecessary temperature control in unused heating modules, as the number of modules used is determined by operator experience rather than optimal processing needs.

Innovation Solution

A coater/developer apparatus and method that automatically determines the number of modules to be used based on necessary staying times and cycle limiting times, optimizing module usage by calculating the necessary transfer cycle time and adjusting the number of modules accordingly, thereby reducing idle module operation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the number of heating modules is increased to ensure sufficient processing capacity, then the processing capability is improved, but electricity waste and running costs increase due to unnecessary temperature control in unused modules

Engineering Contradiction:

Improveprocessing capabilityVSAvoidelectricity waste

Core Design Contradiction:

ProductivityVSLoss of energy

Solution Approach 1:

The system dynamically determines the number of heating modules to be used based on real-time process parameters including necessary staying time and cycle limiting time. This dynamic adjustment allows the system to optimize module usage for each processing cycle, ensuring sufficient processing capacity while minimizing energy waste from idle modules.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The control unit receives feedback from process parameters and automatically determines the optimal number of heating modules to activate. By calculating necessary staying time and comparing it with cycle limiting time, the system provides feedback-driven control that prevents unnecessary temperature control in unused modules, thereby reducing electricity waste while maintaining processing capability.

Inventive Principle:

Principle #23Feedback

2Ease of operation

If operator experience is used to determine the number of modules, then the system is easy to operate, but optimal processing cannot be achieved leading to increased running costs

Engineering Contradiction:

Improveoperator controlVSAvoidoperational efficiency

Core Design Contradiction:

Ease of operationVSProductivity

Solution Approach 1:

The control unit automatically determines the number of heating modules to be used based on process parameters without requiring manual intervention from operators. The system self-calculates necessary staying time, compares it with cycle limiting time, and autonomously optimizes module allocation, thereby improving operational efficiency while maintaining ease of operation through automated decision-making.

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The patent replaces manual operator judgment with an automated control system that uses calculated parameters (necessary staying time, cycle limiting time) to determine module usage. This substitution of mechanical/operator-based decision-making with an automated computational system eliminates the limitations of human experience while maintaining user-friendly operation through automatic optimization.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Reliability

If all heating modules are activated for temperature control, then sufficient processing capacity is ensured, but unnecessary temperature control in unused modules increases running costs

Engineering Contradiction:

Improveprocessing reliabilityVSAvoidoperational cost

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

Instead of activating all heating modules unnecessarily, the system applies partial action by determining and activating only the specific number of modules needed based on process requirements. By calculating necessary staying time and comparing it with cycle limiting time, the system activates exactly the required number of modules, ensuring processing reliability while avoiding the excessive action of running all modules, thereby reducing operational costs.

Inventive Principle:

Principle #16Partial or excessive action

Data Source

PatentUS8372480B2Coater/developer, method of coating and developing resist film, and computer readable storing medium

Publication Date: 2013.02.12 TOKYO ELECTRON LTD

AI summary

A transfer flow is produced in accordance with a process recipe of a process to be carried out. In the transfer flow, a type of modules listed in accordance with a substrate transfer order is associated with a necessary staying time from when the substrate is transferred into a module by a substrate transfer unit to when the substrate is ready to be transferred back to the substrate transfer unit after the corresponding process is finished. A cycle limiting time is determined to be the longest necessary transfer cycle time among those obtained by dividing the necessary staying time by the number of the modules mounted in the coater/developer. The number of the modules to be used is determined to be a value obtained by dividing the necessary staying time by the cycle limiting time or a nearest integer to which the value is raised.