Coating Apparatus Orthogonal Nozzle Motion Arbitrary Angles

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Solution Overview

Problem

Existing coating technologies face challenges in applying polarizing films and wavelength plates at arbitrary angles due to limitations in film thickness reduction and inefficient coating processes, leading to issues with coating direction control and shear stress application.

Innovation Solution

A coating processing apparatus with a substrate holder and a coating nozzle that moves orthogonally to apply a coating liquid containing optical materials, allowing for free control of the coating direction and shear stress, thereby enabling efficient application at arbitrary angles without adhering to the substrate holder.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a stretched film is used to produce polarizing plate or wavelength plate, then the film can be formed with oriented molecules, but the film thickness cannot be reduced sufficiently

Engineering Contradiction:
Improvemolecular orientationVSAvoidfilm thickness
Core Design Contradiction:
Manufacturing precisionVSLength of moving object

Solution Approach 1:

The invention changes the fundamental parameter of film formation from stretching a pre-formed film to depositing a coating liquid that self-organizes into liquid crystal phases. This parameter change enables simultaneous achievement of molecular orientation and thin film thickness, as the coating liquid forms oriented structures during the phase transition process rather than requiring mechanical stretching of a thicker film.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention utilizes phase transitions of liquid crystal materials during coating liquid drying. As the coating liquid evaporates and undergoes phase transition from liquid to liquid crystal phase, the molecules automatically orient themselves in specific directions, achieving molecular orientation without mechanical stretching and enabling thin film formation.

Inventive Principle:
Principle #36Phase transitions

2Adaptability or versatility

If the substrate is inclined or rotated during coating to achieve arbitrary angle, then the coating direction can be controlled, but the coating liquid adheres to the substrate holder requiring frequent cleaning

Engineering Contradiction:
Improvecoating angle controlVSAvoidcleaning time
Core Design Contradiction:
Adaptability or versatilityVSLoss of time

Solution Approach 1:

The invention introduces dynamic control of the substrate holder, enabling it to rotate and incline during the coating process. This dynamic adjustment allows the coating direction to be changed without stopping the process, and the substrate holder can be automatically positioned to prevent coating liquid adhesion, eliminating the need for frequent cleaning operations.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The invention performs preliminary positioning of the substrate holder at specific angles and orientations before coating liquid application. By pre-configuring the substrate holder orientation, the coating liquid is directed precisely where needed, preventing unwanted adhesion to the holder and eliminating subsequent cleaning requirements.

Inventive Principle:
Principle #10Preliminary action

3Ease of operation

If conventional coating apparatus is used, then the coating process is simple, but the coating direction cannot be freely controlled for arbitrary angle application

Engineering Contradiction:
Improvecoating process simplicityVSAvoidcoating direction control
Core Design Contradiction:
Ease of operationVSAdaptability or versatility

Solution Approach 1:

The invention integrates multiple functions into the coating apparatus, including substrate holder rotation, inclination adjustment, and coordinated movement with the coating head. This multi-functional design enables the apparatus to handle both simple and complex coating requirements, providing arbitrary angle control while maintaining operational simplicity through automated coordination of these functions.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables efficient and precise application of coating liquids at arbitrary angles, reducing the need for frequent cleaning and allowing for sufficient shear stress, resulting in improved film formation and reduced operational time.

Implementation Method 1

when the coating liquid is made to flow while applying shear stress, the major axis direction of the supramolecular associated product is oriented to the flowing direction

Methodology Applied
Scientific EffectShear stress: Shear Stress

Implementation Method 2

a coating liquid having liquid crystal property is applied to a substrate as a predetermined material, and the coating liquid is cast and oriented

Methodology Applied
Scientific EffectLiquid crystal property: Liquid Crystals

Data Source

PatentUS11378728B2Coating processing apparatus, coating processing method, and storage medium
Publication Date: 2022.07.05 TOKYO ELECTRON LTD
  • US11378728B2 patent drawing
  • US11378728B2 patent drawing
  • US11378728B2 patent drawing

AI summary

A coating processing apparatus that applies a coating liquid containing an optical material includes a substrate holder that holds a substrate, a coating nozzle that ejects the coating liquid to the substrate held by the substrate holder, and a moving mechanism that relatively moves the substrate holder and the coating nozzle in an orthogonal direction.