Coating and Developing Apparatus Inspection Module Control
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Solution Overview
Problem
The existing coating and developing systems for semiconductor and LCD substrates face inefficiencies due to inspection module troubles and periodic maintenance, leading to decreased throughput and delayed inspections, as they do not effectively manage the transfer of substrates during module unavailability or maintenance.
Innovation Solution
A coating and developing apparatus with a control system that allows for selective transfer of product substrates or confirmation substrates to the inspection module after resolving troubles, and prioritizes confirmation inspections during periodic maintenance, ensuring immediate inspection resumption and reduced inspection times.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If wafers are transferred to the inspection module in the order of inspection reservation signal receipt, then inspection processing is systematic and manageable, but when the inspection module has trouble or requires periodic maintenance, many wafers cannot be inspected because they are transferred in bypassing manner
Solution Approach 1:
The system outputs inspection reservation signals in advance before wafers are transferred to the inspection module. This allows the inspection module to prepare beforehand, and when trouble occurs or maintenance is needed, the system can quickly switch to bypassing mode without waiting for wafer arrival, minimizing inspection downtime and maintaining high productivity while ensuring reliability
Solution Approach 2:
The system dynamically switches between two operational modes: normal inspection mode where wafers are transferred to the inspection module in order of reservation signal receipt, and bypassing mode when the inspection module has trouble or requires maintenance. This dynamic adaptation allows the system to maintain high inspection throughput during normal operation while ensuring inspection availability is preserved during abnormal conditions
2Ease of operation
If inspection reservation signals are outputted in advance to facilitate transfer program creation, then transfer control is simplified, but it takes predetermined time for the inspection module to get prepared, potentially decreasing throughput
Solution Approach 1:
The control system outputs inspection reservation signals in advance of wafer transfer, allowing the transfer program to be created and executed efficiently. Simultaneously, the inspection module uses this lead time for preparation activities. This preliminary action resolves the contradiction by ensuring both ease of transfer control and maintaining high inspection throughput, as the module is ready by the time wafers arrive
3Ease of repair
If wafers are transferred to buffer module instead of inspection module when inspection module has trouble, then inspection module can be maintained or repaired, but wafers cannot be subjected to inspection even after trouble is resolved
Solution Approach 1:
The system outputs inspection reservation signals in advance, allowing the inspection module to complete maintenance or repair activities before wafers needing inspection are transferred. This preliminary signaling ensures that when the module is restored, it is ready to immediately resume inspection operations, maintaining reliability while allowing necessary maintenance
Solution Approach 2:
The buffer module serves as an intermediary, temporarily holding wafers that need inspection when the inspection module is unavailable. This allows the inspection module to be maintained or repaired without losing track of pending inspection requests. The buffer module mediates between the wafer supply and the inspection module, ensuring that inspection availability is restored as quickly as possible after maintenance
Data Source
AI summary
When a product substrate passes a reference module which is an n-th module ahead of an inspection module in a transfer path, an inspection reservation signal for performing an inspection to a lot to which the product substrate belongs is outputted to the inspection module. When the inspection module is in trouble, the output of an inspection reservation signal for a product substrate is forbidden, and the product substrates to be transferred to the inspection module are transferred to a module which is next to the inspection module in a transfer order. When the trouble of the inspection module has been resolved and a substrate for confirmation inspection is preferentially transferred to the inspection module, an inspection reservation signal for the substrate for confirmation inspection is outputted, the substrate for confirmation inspection is transferred to the inspection module, and the confirmation inspection for the inspection module is performed.