Coating State Inspection Using Multi-Angle Light Source Groups
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Solution Overview
Problem
Existing techniques struggle to accurately determine the coating state of an object, such as flux, on a substrate due to variations in reflection characteristics based on the substrate type or pad characteristics.
Innovation Solution
An apparatus comprising one or more light source groups, a camera, and processors that capture and compare images before and after coating to determine the coating state by analyzing changes in brightness and reflection characteristics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional inspection methods are used to determine coating state, then the inspection process is simple, but the measurement precision is poor due to variations in reflection characteristics based on substrate type or pad characteristics
Solution Approach 1:
The patent changes the illumination parameters by using multiple light source groups that emit light at different incident angles and/or different wavelengths. This allows the system to capture images under varied lighting conditions, and by analyzing the differences in reflected light characteristics across these conditions, the coating state can be determined accurately regardless of substrate reflection variations
Solution Approach 2:
The patent introduces light source groups as intermediaries between the substrate and the camera. These light sources act as mediators that illuminate the substrate from specific angles and wavelengths, enabling the camera to capture reflection characteristics that reveal coating state information while compensating for substrate-type-dependent reflection variations
2Measurement precision
If multiple light source groups with different incident angles are used, then the coating state determination accuracy is improved, but the device complexity increases
Solution Approach 1:
The patent divides the illumination system into multiple independent light source groups, where each group is configured to emit light at a specific incident angle or wavelength. This segmentation allows the system to systematically vary illumination parameters and capture comprehensive reflection data, improving coating state determination while maintaining modular system architecture
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables accurate determination of the coating state by utilizing the optical characteristics of light beams and differences in reflection characteristics, enhancing the precision of coating inspection processes.
Implementation Method 1
one or more first images acquired by capturing, with the camera, light beams irradiated from the one or more light source groups and reflected by a substrate
Data Source
AI summary
An apparatus includes one or more light source groups, a camera; one or more memories configured to store one or more first images acquired in advance, and one or more processors communicatively connected to the one or more light source groups, the camera, and the one or more memories, wherein the one or more processors are configured to acquire a second image by controlling a first light source group among the one or more light source groups and the camera and irradiating light beams to a substrate on which an object is coated, and determine a coating state of the object based on the one or more first images and the second image.