Coating and Developing Layout With Mediated Substrate Transfer
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Solution Overview
Problem
Conventional coating and developing devices in semiconductor manufacturing face challenges with substrate particle pollution due to inadequate space for fan filter units (FFU) and inefficient robot operation, leading to reduced process cleanliness and operational efficiency.
Innovation Solution
The proposed coating and developing device features a vertical layout of coating and developing modules, utilizing a mobile conveying part and side robots to transfer substrates, which reduces the need for FFUs and optimizes robot operation efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If the device uses a conventional horizontal layout with multiple unit blocks, then each layer can be equipped with fan filter units (FFU), but the total height of the device becomes too large and space is insufficient
Solution Approach 1:
The patent transitions from a horizontal arrangement of unit blocks to a vertical stacking configuration where coating units and developing units are arranged in different vertical layers. This dimensional change allows multiple processing units to share the same horizontal space while maintaining vertical separation, reducing the device's horizontal footprint and enabling efficient space utilization without requiring excessive device height.
Solution Approach 2:
The patent merges multiple coating units and developing units into a shared housing structure with common support components. The fan filter units (FFU) are strategically positioned to serve multiple units simultaneously, and the support blocks provide shared structural support. This merging approach reduces the total number of duplicate components and optimizes the device height by eliminating redundant structural elements.
2Adaptability or versatility
If robots in each unit block transfer substrates between processing modules and between carrier block and interface block, then all processing can be done in one device, but the robot becomes very busy and operation efficiency is inhibited
Solution Approach 1:
The patent segments the substrate transfer function by introducing dedicated transfer robots positioned between unit blocks, separating the processing tasks from the transfer tasks. Each unit block's processing robot focuses solely on substrate processing operations, while specialized transfer robots handle substrate movement between blocks and to/from the carrier block. This segmentation reduces the operational burden on processing robots and improves overall system efficiency.
Solution Approach 2:
The patent introduces intermediary transfer robots as mediators between the processing units and the carrier block/interface block. These transfer robots act as intermediate handlers that receive substrates from processing robots and deliver them to the appropriate destinations, reducing the direct workload on processing robots and enabling more efficient substrate flow through the system.
3Object-affected harmful factors
If multiple layers of coating modules are vertically stacked, then the number of FFU can be reduced, but the space for substrate transfer becomes more constrained
Solution Approach 1:
The patent utilizes vertical stacking of coating modules and developing modules in different layers, with substrate transfer occurring through vertical and horizontal pathways. The support blocks and connecting structures provide dedicated transfer channels that navigate the three-dimensional space efficiently, ensuring adequate substrate transfer space is maintained despite the vertical compactness.
Solution Approach 2:
The patent employs a nested structural arrangement where support blocks are positioned to provide both structural support and substrate transfer pathways. The connecting structures between vertically stacked units are integrated into the overall framework, with transfer channels nested within the structural elements, maximizing space utilization while maintaining adequate transfer clearance.
Data Source
AI summary
A coating and developing device comprises a front end module (100), a process station (200), and an interface station (300) that are successively connected, wherein the process station (200) comprises a coating unit (210), a developing unit (220), at least one transversely moving of mobile conveying part (230), and at least one side robot (R0). After a substrate has been processed in the coating unit (210), the substrate is transferred to the mobile conveying part (230) by the at least one side robot (R0), and the substrate is transferred to the interface station (300) by the mobile conveying part (230). After the substrate has been processed in the developing unit (220), the substrate is transferred to the mobile conveying part (230) by the at least one side robot (R0), and the substrate is transferred to the front end module (100) by the mobile conveying part (230). The mobile conveying part (230) and the side robot (R0) are configured to be responsible for transferring the substrate between the front end module (100) and the interface station (300) reducing the operating load of the robot in the coating unit (210) or the developing unit (220), and improving the throughput of the coating and developing device.