Coating Module Cathode Layout for Easier Target Replacement
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Solution Overview
Problem
The process of replacing a coating target in existing coating modules is difficult and time-consuming due to the heavy weight of components and the need to align them within a complex geometry, requiring manual intervention and complex mechanical systems.
Innovation Solution
The coating module design separates the magnet system from the rest of the coating unit by mounting it on the chamber lid, allowing the coating target, target backplate, and dark space shield to remain in place during lid opening, enabling manual operation and static media supply, with a flat parting plane and pre-assembled components for easy replacement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the chamber lid is opened together with the coating unit for target replacement, then access to the coating unit is gained, but the heavy weight of components makes alignment difficult and time-consuming
Solution Approach 1:
The patent separates the magnet system from the coating unit by mounting it on the chamber lid instead of integrating it with the coating unit. This segmentation allows the coating unit to be lighter and easier to handle during replacement operations.
Solution Approach 2:
The magnet system is extracted from the coating unit and mounted separately on the chamber lid. This extraction reduces the weight of the coating unit, making it easier to manipulate and align during target replacement without requiring heavy-duty alignment mechanisms.
2Strength
If the coating unit components are heavy, then structural stability is maintained, but manual operation becomes difficult and unsafe
Solution Approach 1:
The coating unit is segmented into lighter components, with the magnet system separated and mounted on the chamber lid. This reduces the weight of individual components that need to be manually handled while maintaining overall structural integrity through proper mounting arrangements.
Solution Approach 2:
The chamber lid acts as an intermediary structure that supports the magnet system separately from the coating unit. This allows the coating unit to be lighter for easier manual operation while the chamber lid provides additional structural support for the magnet system.
3Stability of the object's composition
If the magnet system is integrated with the coating unit, then complete assembly is maintained, but media supply requires complex dynamic connections
Solution Approach 1:
The magnet system is segmented from the coating unit and mounted on the chamber lid. This segmentation allows media supply connections to be made statically to the chamber lid rather than requiring dynamic connections that move with the coating unit.
Solution Approach 2:
The chamber lid serves as an intermediary mounting structure for the magnet system, providing stable mounting points for media supply connections. This eliminates the need for complex dynamic media connections that would be required if the magnet system moved with the coating unit.
Data Source
AI summary
The present invention relates to a coating module for a coating system as well as to a method for replacing a coating target in a coating module.