Coating Source Refill Device for Continuous Vacuum Operation
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Solution Overview
Problem
Existing coating sources for large-scale glass substrates or Si wafers require frequent refilling, which necessitates interrupting the coating process and potentially disassembling parts of the coating source, leading to undesirable and costly interruptions.
Innovation Solution
A coating source with a crucible closed by a semi-transparent IR radiation-permeable lid, equipped with a refilling device that includes a storage container and a filler neck with a closable valve, allowing for refilling without opening the vacuum chamber or disassembling the coating source.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If the crucible is refilled by opening the vacuum chamber and disassembling the coating source, then the coating material can be replenished, but the coating process must be interrupted and productivity decreases
Solution Approach 1:
The system is divided into two separate chambers: a main vacuum chamber containing the crucible for coating, and a separate filling chamber for refilling coating material. The crucible can be refilled through a transfer mechanism without opening the main vacuum chamber, thus maintaining coating process continuity while replenishing coating material.
Solution Approach 2:
A transfer mechanism acts as an intermediary between the filling chamber and the crucible. This intermediary system allows coating material to be transferred from the filling chamber to the crucible without direct opening of the main vacuum chamber, preventing process interruption while enabling material replenishment.
2Quantity of substance
If the crucible is refilled by disassembling the coating source, then the coating material can be replenished, but the coating source complexity increases and operation becomes more difficult
Solution Approach 1:
The coating source is segmented into a fixed main chamber and a separate movable filling chamber. The filling chamber can be independently operated and attached/detached without disassembling the entire coating source, simplifying the refilling operation while maintaining the ability to replenish coating material.
Solution Approach 2:
The filling chamber is designed with dynamic attachment and detachment capabilities, allowing it to be moved into position for refilling and then retracted. This dynamic design enables easy refilling operations without requiring permanent disassembly of the coating source structure.
3Ease of operation
If a lid with filler neck is used on the crucible, then the crucible can be refilled without disassembly, but the lid must be semi-transparent to IR radiation requiring additional heating
Solution Approach 1:
The lid is designed with localized properties: most of the lid remains opaque to maintain thermal insulation, while specific regions (filler neck area) are made semi-transparent to IR radiation. This allows targeted heating of the filler neck region through IR radiation sources while maintaining overall crucible heating efficiency.
Solution Approach 2:
The lid material properties are changed locally to be semi-transparent to IR radiation in specific regions. This parameter change allows IR radiation to pass through the filler neck area to heat the coating material and prevent condensation, while the rest of the lid maintains its insulating properties.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables continuous operation of the coating plant by allowing refilling of the coating material without interrupting the process, reducing the need for multiple coating sources, and minimizing contact with hazardous materials.
Implementation Method 1
The crucible is closed with a lid that is semi-transparent to infrared (IR) radiation and the coating source comprises at least one first IR radiation source outside the closed crucible for heating the crucible and/or the coating material
Implementation Method 2
The heating of the crucible and/or the coating material according to the invention by means of an external IR radiation source through the semi-transparent lid allows heating the at least one opening in the lid and the closable filler neck adjoining it in such a way that condensation of vaporized coating material in the region of the at least one opening and the adjoining filler neck can be prevented
Implementation Method 3
coating sources with a crucible are typically used in which the material to be vaporized is heated to such an extent that it vaporizes and is available for coating
Data Source
AI summary
The present invention relates to a coating source for a coating plant, a coating plant with such a coating source and a method for coating substrates using such a coating source. Furthermore, the present invention relates to a method for refilling a coating source.