Coaxial Backscattered Electron Detector for X-ray Analysis Positioning
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Solution Overview
Problem
In scanning electron microscopes, concave-convex portions on the sample surface obstruct X-ray detection, leading to decreased spectral intensity and inaccurate elemental analysis, making it difficult to determine suitable analysis positions without reworking the sample and detector alignment.
Innovation Solution
A charged-particle radiation apparatus with a first back scattered electron detector disposed coaxially or non-coaxially with the X-ray detector, allowing simultaneous or separate detection of X-ray and back scattered electron signals to evaluate and distinguish suitable analysis positions before X-ray elemental analysis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If normal X-ray elemental analysis is performed using a top-BSE detector disposed directly above the sample surface, then composition contrast can be acquired, but spectral intensity is decreased due to blocking by concave-convex portions on the sample surface
Solution Approach 1:
A coax-BSE detector is introduced as an intermediary device disposed coaxially with the X-ray detector. This mediator provides backscattered electron images that accurately reflect the surface topology as seen by the X-ray detector, enabling proper selection of analysis positions without direct manual inspection and adjustment
Solution Approach 2:
The system performs preliminary acquisition of coax-BSE images before X-ray analysis to pre-evaluate suitable analysis positions. This preliminary action allows the operator to identify and select optimal analysis locations in advance, avoiding the need for reworking during the actual analysis process
2Productivity
If analysis is performed on places with concave-convex portions, then analysis can be attempted, but accurate data interpretation cannot be performed due to blocked X-ray detection
Solution Approach 1:
The system performs preliminary evaluation of analysis positions using coax-BSE images before acquiring X-ray spectral data. This preliminary action identifies and excludes positions with concave-convex portions that would block X-ray detection, ensuring that only reliable analysis positions are selected and eliminating the need for reworking
Solution Approach 2:
The system provides feedback through coax-BSE images that show the actual surface topology as viewed by the X-ray detector. This feedback mechanism allows the operator to make informed decisions about analysis position selection, ensuring high reliability of analysis results while maintaining productivity
3Measurement precision
If the positional relationship between sample and X-ray detector is readjusted to avoid blocked X-ray detection, then accurate analysis can be performed, but additional time is required for reworking
Solution Approach 1:
The system performs preliminary acquisition of coax-BSE images and evaluation of analysis positions before the actual X-ray analysis. This preliminary action identifies optimal analysis positions in advance, eliminating the need for time-consuming reworking and positional readjustment during the analysis process
Solution Approach 2:
The system provides self-service by automatically generating and displaying coax-BSE images that show the surface topology as viewed by the X-ray detector. This self-service capability allows the operator to independently evaluate and select appropriate analysis positions without requiring iterative adjustment and re-acquisition
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and reliable X-ray elemental analysis by utilizing back scattered electron information to identify optimal analysis positions, reducing the need for reworking and ensuring high reliability in analysis results.
Implementation Method 1
a characteristic X-ray is detected with an X-ray detector located at an angular position different from the BSE detector
Implementation Method 2
a back scattered electron image, from which a composition contrast can be acquired, is being viewed
Data Source
AI summary
In order to provide a charged-particle radiation apparatus capable of evaluating and distinguishing the analysis position in a sample subjected to X-ray analysis in the stage before performing X-ray elemental analysis, and also making it possible for an analyst to perform, in a short period of time and without reworking, analysis for which high reliability is ensured, the present invention provides a charged-particle radiation apparatus provided with an X-ray detector, wherein a first back scattered electron detector (15) on the same axis as the X-ray detection surface of the X-ray detector (12 (25-30)) is disposed integrally with or independently from the X-ray detector (12), an X-ray signal being detected by the X-ray detector (12) simultaneously with or separately from detection of a back scattered electron signal by the first back scattered electron detector (15).