Coaxial-Cable Coupled Water-Cooled SWP Generator
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Solution Overview
Problem
Conventional surface wave plasma generators face limitations due to inefficient electromagnetic wave transmission and cooling fluid contamination, leading to reduced performance and flexibility in semiconductor processing applications.
Innovation Solution
A coaxial-cable coupled and water-cooled surface wave plasma generator design that allows flexible electromagnetic wave transmission and prevents cooling fluid leakage into the dielectric tube, using a coaxial cable and cooling jacket to maintain efficient wave transmission without fluid contact.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If deionized water is used as cooling fluid in the dual tube structure, then cooling efficiency is improved, but electromagnetic wave transmission efficiency deteriorates due to higher energy losses
Solution Approach 1:
The patent introduces a dielectric layer as an intermediary substance between the cooling fluid and the electromagnetic wave path. This dielectric layer has low loss tangent properties that allow electromagnetic waves to pass through efficiently while still permitting effective heat transfer from the inner tube to the cooling fluid, thus resolving the contradiction between cooling efficiency and electromagnetic wave transmission efficiency
Solution Approach 2:
The patent employs composite material structure consisting of the dielectric discharge tube made from materials with specific dielectric properties combined with the cooling fluid system. The composite structure optimizes both thermal conduction for cooling and electromagnetic wave transmission by selecting materials with appropriate dielectric constants and loss tangents
2Loss of energy
If dielectric oil is used as cooling fluid, then electromagnetic wave transmission efficiency is improved, but cooling efficiency deteriorates requiring high pressure and large flow rate
Solution Approach 1:
The dielectric layer serves as a mediator that enables the use of deionized water (high cooling efficiency) without compromising electromagnetic wave transmission. The layer transmits heat effectively while being transparent to electromagnetic waves, eliminating the need to use dielectric oil which has poor cooling efficiency
3Temperature
If cooling fluid is introduced between inner tube and outer tube, then cooling capability is improved, but risk of fluid leakage into plasma chamber increases
Solution Approach 1:
The dielectric layer acts as an intermediary barrier between the cooling fluid and the plasma chamber environment. This layer prevents direct contact and potential leakage of cooling fluid into the plasma chamber while maintaining thermal conduction for effective cooling of the discharge tube
4Loss of energy
If fixed tube waveguide structure is used, then electromagnetic wave transmission is achieved, but flexibility and adaptability in installation deteriorates
Solution Approach 1:
The patent replaces the fixed rigid waveguide structure with a flexible coaxial cable system that can be dynamically positioned and routed. This dynamic structure maintains electromagnetic wave transmission capability while providing flexibility for various installation configurations and orientations in different processing environments
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances the flexibility and efficiency of electromagnetic wave transmission, reduces the risk of cooling fluid contamination, and maintains high plasma density and radical generation capabilities, improving the operational range and performance of surface wave plasma generators.
Implementation Method 1
a coaxial cable (200) for transmitting the electromagnetic wave generated from an electromagnetic wave oscillation unit to the dielectric tube (300)
Implementation Method 2
a cooling jacket (500) having a cooling channel (510) extending along a longitudinal direction and along a circumference, and through which a cooling fluid flows
Implementation Method 3
the cooling fluid flows between an inner tube and an outer tube of the dual tube structure
Implementation Method 4
Surface wave plasma SWP is generated by a surface wave being propagated to an interface between the plasma and the dielectric
Implementation Method 5
The electromagnetic wave transmitted through the waveguide 10 is introduced into the discharge tube 20. Subsequently, the electromagnetic wave introduced into the discharge tube 20 reacts with the discharge gas injected into the discharge tube 20, thereby generating plasma inside the discharge tube 20
Data Source
Figure 1~2A
Figure 2B
Figure 3~4
AI summary
There is provided a coaxial-cable coupled and water-cooled SWP (surface wave plasma) generator, wherein the generator comprises: a hollow connector (100) having a first inner space defined therein; a coaxial-cable (200) connected to the hollow connector (100), wherein the cable (200) has a core (210) configured to transmit an electromagnetic wave from an electromagnetic wave oscillating unit to the hollow connector (100), wherein the core (210) extends into the inner space of the hollow connector (100); a dielectric tube (300) having a first end portion electromagnetically coupled to the hollow connector (100) so that the electromagnetic wave transmitted into the hollow connector (100) is electromagnetically inputted into the dielectric tube (300); and a discharge gas injection unit (400) fluid-communicating with the dielectric tube (300) to inject a discharge gas into the dielectric tube (300).