3D Coaxial Filter Circuit for Compact Plasma Noise Blocking
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Solution Overview
Problem
Existing plasma processing apparatuses face high machining costs and increased processing waste due to complex and large high-frequency filters with three-dimensional structures, which are difficult to manufacture and require multiple parts.
Innovation Solution
A filter circuit with a three-dimensional structure featuring a coaxial multipole antenna and rod-shaped bodies, using a dielectric to insulate the power supply line and reduce the complexity and waste by minimizing the number of machined parts.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a complex three-dimensional high-frequency filter structure is used, then filtering performance is improved, but manufacturing cost and processing waste increase
Solution Approach 1:
The filter structure is divided into multiple fin-shaped components (first fins connected to the inner conductor, second fins connected to the outer conductor) that can be manufactured separately and assembled, reducing machining complexity and waste while maintaining the three-dimensional filtering performance
Solution Approach 2:
The filter transitions from a planar structure to a three-dimensional structure with fins extending in multiple directions, improving filtering effectiveness without significantly increasing manufacturing complexity by using simple extruded fin shapes rather than complex machined components
2Reliability
If a complex three-dimensional high-frequency filter structure is used, then filtering performance is improved, but the number of parts and device complexity increase
Solution Approach 1:
The filter combines the inner conductor, outer conductor, and fin structures into a single integrated component where the first fins extend from the inner conductor and second fins extend from the outer conductor, reducing the number of separate parts while maintaining three-dimensional filtering performance
3Reliability
If traditional high-frequency filter structures are used, then noise blocking is effective, but miniaturization is limited
Solution Approach 1:
The filter uses a three-dimensional structure with fins extending radially and axially, achieving effective noise blocking in a compact volume by utilizing spatial arrangement rather than increasing component size, enabling miniaturization while maintaining filtering performance
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The filter circuit reduces costs and minimizes processing waste while effectively blocking high-frequency noise, allowing for a miniaturized and efficient plasma processing apparatus.
Implementation Method 1
a capacitor for attenuating or blocking high-frequency noise entering a heater power supply line through a heating element
Data Source
AI summary
A filter circuit comprises an input port configured to have a first inner conductor and a first outer conductor, an output port configured to have a second inner conductor and a second outer conductor, a ground base configured to connect the first outer conductor of the input port and the second outer conductor of the output port, an antenna base configured to connect the first inner conductor of the input port and the second inner conductor of the output port, a ground fin configured to extend from the ground base toward the antenna base, and an antenna fin configured to extend from the antenna base toward the ground base with a gap provided between the ground fin and the antenna fin. The antenna fin includes a plurality of first rod-shaped bodies connected to the antenna base.