Coaxial Laser Illumination for High Aspect Ratio Fluorescence Detection

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Solution Overview

Problem

Existing fluorescence imaging systems for inspecting electronic devices with high aspect ratio (HAR) structures face challenges in efficient illumination and image contrast due to strong reflections from copper or other reflective surfaces, leading to reduced illumination intensity and inefficient diffuse illumination.

Innovation Solution

A system utilizing a laser light source coupled with an optical fiber to guide laser light perpendicular to the workpiece, accompanied by an illumination optical assembly to direct the laser light effectively between HAR structures, and a collection optical assembly to separate fluorescent light from reflected laser light, enabling clear fluorescence imaging.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If LEDs are used to illuminate the PCB, then the illumination source is simple and inexpensive, but strong reflection from copper surfaces reduces illumination intensity and image contrast

Engineering Contradiction:
Improvesimplicity and cost of illumination sourceVSAvoidillumination intensity between HAR structures
Core Design Contradiction:
Ease of manufactureVSIllumination intensity

Solution Approach 1:

The patent changes the illumination parameters by using laser light with specific wavelengths (350-450 nm) that optimize fluorescence excitation while penetrating HAR structures more effectively. The laser provides coherent, monochromatic light that can be precisely controlled in intensity and direction, overcoming the reflection issues that plague LED-based systems.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs optical fibers to deliver laser light in a flexible, curved path to the illumination point. The optical fiber acts as a flexible waveguide that can navigate around HAR structures and deliver light from multiple angles, creating effective diffuse illumination that penetrates deep into the PCB structure between high aspect ratio features.

Inventive Principle:
Principle #14Spheroidality (Curvature)

2Object-affected harmful factors

If LEDs are angled relative to the substrate to reduce reflection, then reflection is minimized, but illumination intensity between HAR structures is reduced and diffuse illumination becomes inefficient

Engineering Contradiction:
Improvereflection from copper surfacesVSAvoidillumination intensity between HAR structures
Core Design Contradiction:
Object-affected harmful factorsVSIllumination intensity

Solution Approach 1:

The patent segments the illumination path by using optical fibers to deliver light from multiple independent sources to different locations on the PCB. This allows simultaneous illumination from multiple angles and positions, ensuring that light penetrates effectively between HAR structures while minimizing reflection from any single surface angle.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces optical fibers as intermediaries between the laser source and the PCB surface. These fibers act as flexible light guides that can deliver illumination from optimal angles while the laser light itself maintains perpendicular incidence on the workpiece, separating the function of angle control (handled by fiber positioning) from the function of illumination (handled by perpendicular laser incidence).

Inventive Principle:
Principle #24Intermediary (Mediator)

3Illumination intensity

If perpendicular laser illumination is used, then homogeneous illumination between HAR structures is achieved, but reflected laser light interferes with fluorescence detection

Engineering Contradiction:
Improvehomogeneous illumination between HAR structuresVSAvoidreflected laser light interference
Core Design Contradiction:
Illumination intensityVSObject-generated harmful factors

Solution Approach 1:

The patent extracts the harmful reflected laser light from the detection path using optical filters and beam splitters. These components separate the reflected laser wavelengths from the fluorescence wavelengths, allowing only the fluorescent signal to reach the detector while blocking the intense reflected laser light that would otherwise overwhelm the weak fluorescence signal.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent applies local quality by using wavelength-specific optical filters at the detection point. These filters are tailored to transmit only the fluorescence wavelength range while blocking the laser wavelength, creating a localized spectral filtering effect that eliminates interference exactly where detection occurs without affecting the perpendicular illumination geometry.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system achieves improved fluorescence generation and detection by providing high-intensity, homogeneous illumination between HAR structures, resulting in sharper, high-contrast fluorescence images that enhance defect detection in electronic devices.

Implementation Method 1

The workpiece may emit fluorescent light along an emission path based on illumination from the laser light

Methodology Applied
Scientific EffectFluorescence: Fluorescence

Implementation Method 2

an optical fiber coupled to the laser light source and configured to guide the laser light along an illumination path

Methodology Applied
Scientific EffectOptical fiber guidance: Optical Fibre

Data Source

PatentUS20250180484A1Apparatus and method for fluorescence detection in electronic devices with high brightness coaxial diode laser illumination
Publication Date: 2025.06.05 ORBOTECH LTD
  • US20250180484A1 patent drawing
  • US20250180484A1 patent drawing
  • US20250180484A1 patent drawing

AI summary

The system includes a laser light source configured to emit laser light; an optical fiber coupled to the laser light source and configured to guide the laser light along an illumination path; and an illumination optical assembly disposed in the illumination path and configured to direct the laser light on a workpiece. The workpiece emits fluorescent light along an emission path based on illumination from the laser light. The system further includes a collection optical assembly disposed in the emission path and configured to separate the fluorescent light from reflected laser light; and a detector disposed in the emission path and configured to generate one or more fluorescence images based on the fluorescent light.