Coaxial Liquid-Gas Nozzle for Single-Pass Coating Removal
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Solution Overview
Problem
Current methods for removing coatings from substrate edges in semiconductor and photonic device fabrication are inefficient, often requiring multiple passes, risk breaking fragile panels, and can result in redeposition of debris, while traditional laser and plasma ablation tools are expensive and pose safety hazards.
Innovation Solution
An apparatus and method using a nozzle with an inner conduit for a liquid stream and an outer conduit for a gas flow to impinge on the coated surface, allowing for efficient removal of coatings with a tear-drop shaped liquid droplet, adjustable angles and pressures, and translation of the nozzle to trace a path on the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If laser or plasma ablation is used to remove coatings from substrate edges, then coating removal can be achieved, but multiple passes are required and debris redeposition occurs on coated surfaces
Solution Approach 1:
The patent replaces thermal/mechanical ablation methods (laser or plasma) with a fluid jet system that uses pressurized liquid to mechanically erode and remove coatings. This substitution enables complete coating removal in a single pass without the redeposition problems associated with ablation methods, as the liquid jet directly transports debris away from the surface.
Solution Approach 2:
The invention employs a hydraulic jet system where pressurized liquid flows through a nozzle to impact and remove coatings from substrate edges. The hydraulic energy of the liquid jet provides sufficient force to erode various coating materials efficiently in one pass, eliminating the need for multiple sequential passes required by ablation methods.
2Manufacturing precision
If laser ablation is used for coating removal, then coatings can be removed, but expensive equipment and ventilation systems are required
Solution Approach 1:
The patent replaces expensive, complex laser or plasma generation equipment with a simple, inexpensive liquid jet system. The consumable element is the liquid itself, which is cheap and readily available, eliminating the need for costly laser sources, plasma chambers, and associated safety ventilation systems while achieving the same coating removal function.
3Manufacturing precision
If traditional laser coating removal methods are used, then coatings can be removed, but fragile thin substrates (200-250 micron) risk breaking
Solution Approach 1:
The patent replaces high-energy laser ablation with a controlled liquid jet erosion process. The liquid jet applies mechanical force that is sufficient to remove coatings but is more controllable and less likely to cause thermal stress or mechanical shock that would fracture thin, fragile substrates. The fluid nature of the jet allows it to conform to the substrate surface without concentrating stress at weak points.
4Manufacturing precision
If laser ablation is used to remove coatings like copper or titanium, then some coating removal is achieved, but large amounts of energy are needed
Solution Approach 1:
The invention uses hydraulic energy from pressurized liquid to erode and remove coatings, providing a more energy-efficient alternative to laser ablation. The liquid jet delivers mechanical energy directly to the coating material through impact and cavitation, effectively removing even difficult-to-remove coatings like copper and titanium without the excessive energy consumption required by laser methods.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively removes coatings with a sharp edge formation, reducing defects and debris, while being cost-effective and safer than traditional methods, suitable for various substrate types and coatings.
Implementation Method 1
The inner conduit is configured to direct a liquid stream through the orifice to impinge on the coated surface
Implementation Method 2
The liquid stream may include a chemical composition that includes one or more of H2O2, H2SO4, SPS, and TBR19
Implementation Method 3
The outer conduit is configured to direct a gas flow through the annular opening to surround the liquid stream from the orifice
Data Source
Figure 1~2
Figure 3~4
Figure 5A~6
AI summary
A method of removing a coating from a substrate comprises positioning a nozzle of an apparatus such that a longitudinal axis of a distal end of the nozzle is inclined at an angle θ with a coated surface of the substrate. The nozzle including an inner conduit having an orifice and an outer conduit coaxially arranged about the inner conduit and defining an annular opening between the inner and outer conduits. Directing a liquid stream through the orifice toward the coated surface and directing a gas flow through the annular opening such that the gas flow surrounds the liquid stream, and impinging the liquid stream on the coated surface.