Coaxial Probe Elastic Buffering for Semiconductor Testing
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Solution Overview
Problem
Coaxial probes used in high-frequency testing of semiconductor devices face durability and assembly challenges, particularly in downsized configurations, where repeated testing and integration with highly-integrated semiconductor devices require improved durability and ease of assembly.
Innovation Solution
A coaxial probe design featuring internal and external elastic members, gap members, and a dielectric or conductive elastic member to create air gaps and enhance signal integrity, while external elastic members provide additional buffering and ease of assembly through a simplified manufacturing process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the coaxial probe is downsized to match highly-integrated semiconductor devices, then the probe can be applied to more advanced semiconductor devices, but the durability and ease of assembly deteriorate
Solution Approach 1:
The coaxial probe is divided into modular components: internal conductor assembly (upper contact, lower contact, internal elastic member) and external conductor assembly (external conductor, external elastic member, gap members). This segmentation allows each module to be optimized independently for durability while maintaining a compact overall structure suitable for highly-integrated semiconductor devices.
Solution Approach 2:
Elastic members are pre-installed in the probe structure to provide cushioning before impacts occur. The internal elastic member cushions the upper contact against impacts from the semiconductor device, while the external elastic member cushions the external conductor against impacts from the tester. This beforehand cushioning prevents damage during repeated testing, improving durability without increasing probe size.
2Productivity
If the coaxial probe structure is simplified to improve assembly ease, then productivity increases, but connection stability may worsen
Solution Approach 1:
The internal elastic member and external elastic member work together as a combined cushioning system. The internal elastic member is integrated with the upper and lower contacts, while the external elastic member is integrated with the external conductor. This merging of elastic cushioning functions into a coordinated system provides stable connections during assembly and operation, while the modular design maintains assembly simplicity.
Solution Approach 2:
The elastic members act as intermediaries between the rigid conductive components. The internal elastic member mediates between the upper contact and lower contact, absorbing misalignments and impacts. The external elastic member mediates between the external conductor and the tester. This intermediary function ensures stable electrical connections while simplifying the assembly process by accommodating tolerances without requiring precision alignment.
3Reliability
If gap members are added to create air gaps between conductors, then signal integrity improves, but device complexity increases
Solution Approach 1:
Air gaps are created only at specific critical locations between the internal conductor and external conductor where signal interference is most likely to occur. The gap members are positioned locally at these points rather than throughout the entire structure. This localized approach maintains signal integrity by blocking harmful electromagnetic coupling while minimizing the addition of components and structural complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design enhances durability by providing effective buffering against repeated impacts and improves assembly efficiency, ensuring stable connections and prolonged lifespan of the coaxial probe, especially in downsized configurations.
Implementation Method 1
an internal elastic member configured to elastically bias at least one of the upper and lower contacts to make the upper and lower contacts distant from each other
Implementation Method 2
at least one external elastic member that is inserted into an external circumferential surface of the external conductor to elastically bias at least one of the semiconductor device and the tester to a direction that makes either the semiconductor device or the test distant from the external conductor
Implementation Method 3
a plurality of gap members which is respectively inserted into opposite ends between the internal conductor and the external conductor to create a predetermined air gap between the internal conductor and the external conductor
Data Source
AI summary
Disclosed is a coaxial probe comprising, an internal conductor comprising an upper contact configured to contact a semiconductor device; a lower contact configured to contact a tester for testing the semiconductor device; and an internal elastic member configured to elastically bias at least one of the upper and lower contacts to make the upper and lower contacts distant from each other; an external conductor configured to surround the internal conductor; a plurality of gap members which is respectively inserted into opposite ends between the internal conductor and the external conductor to create a predetermined air gap between the internal conductor and the external conductor; and at least one external elastic member that is inserted into an external circumferential surface of the external conductor to elastically bias at least one of the semiconductor device and the tester to a direction that makes either the semiconductor device or the test distant from the external conductor.