Coaxial RF Filter Circuit for Compact Plasma Power Feed
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Solution Overview
Problem
Current RF filters in plasma processing apparatuses have a complex and large structure, necessitating a miniaturized version with a simple configuration to effectively block radio frequency noise while allowing direct current to pass through.
Innovation Solution
A filter circuit with a housing made of a conductor, featuring an input and output port with coaxial structures, a protruding conductor, and an antenna surrounding the protrusion, which forms a choke structure to block RF frequencies, ensuring the power supply line is insulated from the housing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If conventional RF filters are used, then RF noise blocking is achieved, but the structure becomes complex and large
Solution Approach 1:
The patent combines multiple filter elements (coaxial conductors, housing, and antenna) into an integrated structure where the housing serves as both mechanical support and electrical ground reference, eliminating the need for separate mounting structures and reducing overall complexity
Solution Approach 2:
The antenna is positioned inside the housing and surrounded by the coaxial conductors, creating a nested configuration where smaller components are placed within larger structures to achieve compact filtering functionality
2Object-affected harmful factors
If conventional RF filters are used, then RF noise blocking is achieved, but the size increases
Solution Approach 1:
The antenna is positioned inside the housing and surrounded by the coaxial conductors, creating a nested configuration where smaller components are placed within larger structures to achieve compact filtering functionality
Solution Approach 2:
The filter utilizes the radial dimension by positioning the antenna around the protruding conductor and using the housing walls as additional filtering elements, transforming a linear arrangement into a three-dimensional compact structure
3Device complexity
If simple filter structures are used, then device complexity is reduced, but RF noise blocking effectiveness decreases
Solution Approach 1:
The housing serves multiple functions simultaneously: mechanical enclosure, electrical ground reference, and RF shielding, while the coaxial conductors provide both structural support and filtering functionality, reducing the need for additional specialized components
4Productivity
If DC power is applied to electrostatic electrodes, then plasma processing efficiency is enhanced, but ground faults may occur
Solution Approach 1:
The filter circuit acts as an intermediary between the DC power supply and the electrostatic electrode, providing RF noise filtering and ground fault protection while allowing DC power to pass through to enable plasma processing
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables the miniaturization of RF filters with a simple structure, effectively blocking RF frequencies and allowing DC power to be applied to electrostatic electrodes without ground faults, thus enhancing the efficiency of plasma processing.
Implementation Method 1
an antenna connected to the input-side conductor and the output-side conductor and formed to surround the first protrusion
Data Source
AI summary
A filter circuit includes a housing made of a conductor and comprising an input port and an output port, each of which comprises an outer conductor and an inner conductor, wherein the housing is configured to have a ground potential together with the outer conductors of the input port and the output port, a first protrusion made of a conductor and connected to the housing, wherein the first protrusion is configured to protrude into the housing, and a power supply line provided within the housing and insulated from the housing. The power supply line includes an input-side conductor which is the inner conductor of the input port, an output-side conductor which is the inner conductor of the output port, and an antenna connected to the input-side conductor and the output-side conductor and formed to surround the first protrusion.