Coaxial-Linkage Robot Arm for Extended Reach and Clearance
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Solution Overview
Problem
Existing two-linkage robot arms in semiconductor manufacturing face limitations in reach, weight, acceleration, and throughput due to bridge structures, skewed linkages, and rigidly connected architectures, which compromise efficiency and productivity.
Innovation Solution
A robot arm design with coaxial drive shafts independently driven by motors, featuring specific pulley ratios and synchronized rotation of linkages to extend one linkage while rotating the other out of the way, allowing for extended reach and clearance without interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If bridge structures or rigidly connected architectures are used in two-linkage robot arms, then structural stability is improved, but reach and acceleration are limited
Solution Approach 1:
The robot arm is divided into two independent linkages (first linkage and second linkage) that can operate independently. Each linkage has its own drive shaft and motor, allowing them to be controlled separately to extend reach without compromising structural stability. The linkages can be positioned in different configurations (e.g., one retracted while the other extends) to optimize both stability and reach.
2Stability of the object's composition
If bridge structures or rigidly connected architectures are used in two-linkage robot arms, then structural stability is improved, but acceleration and throughput are reduced
Solution Approach 1:
The system transitions from a rigid, static architecture to a dynamic one where the two linkages can move independently and be positioned optimally for each operation. The control system dynamically adjusts the position of each linkage based on the task requirements, enabling faster cycle times and improved throughput while maintaining stability when needed.
3Length of moving object
If skewed linkages are used in robot arms, then reach is extended, but device complexity and interference between linkages increase
Solution Approach 1:
The solution moves from a planar, two-dimensional linkage arrangement to a three-dimensional spatial configuration. By utilizing vertical stacking and radial positioning of the two linkages around a common drive shaft, the system achieves extended reach in multiple directions without the linkages interfering with each other, thereby reducing overall architectural complexity.
4Length of moving object
If coaxial drive shafts with synchronized rotation are used, then reach and clearance are extended, but device complexity increases
Solution Approach 1:
The system merges the drive mechanisms of the two linkages by using coaxial drive shafts that share a common rotational axis. This integration allows both linkages to be driven from a compact central location, reducing overall system complexity while still enabling independent control and extended reach through synchronized or independent rotation as needed.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances the reach and throughput of material-handling robots by minimizing interference and optimizing the extension and retraction of linkages, thereby improving productivity in semiconductor manufacturing.
Implementation Method 1
a ratio of diameters of the first shoulder pulley and the first elbow pulley is greater than 2:1
Implementation Method 2
the first elbow pulley connected to the first shoulder pulley through a first belt drive arrangement
Data Source
AI summary
An apparatus includes a robot drive comprising a plurality of coaxial drive shafts, each of the coaxial drive shafts being independently driven by a respective motor; an arm connected to the robot drive and rotatable on the robot drive, the arm comprising a first linkage and a second linkage; and a controller configured to control the respective motors driving the coaxial drive shafts. The respective motors are controlled to drive the coaxial drive shafts to cause the second linkage, in a retracted position, to be rotated out of the way of the first linkage at a same time as the first linkage is extended.


