Coaxial Semiconductor Testing Probe Design

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Solution Overview

Problem

Conventional semiconductor testing probes and gold-fingers face challenges with low manufacturing accuracy, structural strength, short lifespan, and low testing accuracy due to miniaturization, leading to issues with voltage drop and probe dislodgment during electrical testing.

Innovation Solution

A coaxial testing probe design featuring a first testing tip surrounded by a second testing tip with an insulation layer, enhancing mechanical strength and accuracy while maintaining a constant distance, and a semiconductor testing fixture with integrated probes on a substrate for improved testing efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the size of top-probes and gold-fingers is reduced to match miniaturized semiconductor terminals, then the testing capability for small devices is improved, but the mechanical strength and structural stability deteriorate

Engineering Contradiction:
Improvetesting capability for miniaturized devicesVSAvoidmechanical strength of probes
Core Design Contradiction:
Adaptability or versatilityVSStrength

Solution Approach 1:

The patent implements a nested coaxial structure where the first testing tip is positioned inside the second testing tip, forming a concentric arrangement. This nesting allows both probes to be integrated within a compact footprint while maintaining adequate mechanical strength through the outer probe's structural support, resolving the contradiction between miniaturization adaptability and mechanical strength.

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The patent transitions from a planar side-by-side probe arrangement to a three-dimensional coaxial configuration. By utilizing the vertical dimension and creating a concentric structure, the design achieves better space utilization for miniaturized devices while the outer probe provides structural reinforcement, simultaneously improving adaptability to small devices and maintaining mechanical strength.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Measurement precision

If the distance between two parallel probes is reduced to improve testing accuracy, then the measurement precision is improved, but the probes become prone to spinning out due to torque force

Engineering Contradiction:
Improvetesting accuracyVSAvoidprobe stability during testing
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The coaxial nesting arrangement positions the first testing tip centrally within the second testing tip, creating a symmetric configuration that balances torque forces during testing. This geometric arrangement prevents the probes from spinning out while maintaining precise positioning, thereby improving both measurement precision and reliability simultaneously.

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The symmetric coaxial arrangement creates a balanced force distribution where torque forces act equidistantly on both probes. This equipotential-like symmetry in force distribution prevents rotational instability and probe dislodgment, ensuring reliable testing while maintaining accurate measurements.

Inventive Principle:
Principle #12Equipotentiality

3Measurement precision

If the resistance of top-probes is reduced to minimize voltage drop, then the testing accuracy for large currents is improved, but the probe dimensions must be increased which conflicts with miniaturization

Engineering Contradiction:
Improvetesting accuracy for large currentsVSAvoidprobe dimensions
Core Design Contradiction:
Measurement precisionVSLength of moving object

Solution Approach 1:

The patent merges two probe structures into a single coaxial assembly where the first and second testing tips work together. This combination effectively doubles the conductive path cross-section, reducing overall resistance and voltage drop without increasing the external footprint, thus improving current testing accuracy while maintaining miniaturization.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The nested coaxial structure allows the inner probe to be surrounded by the outer probe, creating a composite conductor with higher effective cross-sectional area. This reduces resistance and voltage drop for large current measurements while the compact nested arrangement maintains small overall dimensions, resolving the contradiction between low resistance and miniaturization.

Inventive Principle:
Principle #7Nested doll (Nesting)

Data Source

PatentUS10067162B2Testing probe, semiconductor testing fixture and fabrication method thereof
Publication Date: 2018.09.04 NANTONG FUJITSU MICROELECTRONICS
  • US10067162B2 patent drawing
  • US10067162B2 patent drawing
  • US10067162B2 patent drawing

AI summary

A testing probe is provided. The testing probe includes a first testing tip; an insulation layer formed on a side surface of the first testing tip; and a second testing tip being coaxial with the first testing tip and surrounding the first testing tip formed on a side surface of the insulation layer.