Coaxial Valve Block Layout for Faster Chemical Container Purging
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Solution Overview
Problem
The semiconductor fabrication industry faces inefficiencies in chemical container changeout processes due to large piping runs and deadlegs in chemical delivery systems, which increase purge time and decrease purging efficiency, especially with chemicals like tetrakis(dimethylamido)titanium (TDMAT) that require solvent purging.
Innovation Solution
A low volume block valve design that eliminates deadlegs by using high pressure, high velocity purge gas and internal coaxial lines, allowing for improved purging efficiency and safety during chemical container changeouts.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If large piping runs and deadlegs are used in chemical delivery system design, then the system can accommodate chemical container changeout processes, but purge time increases and purging efficiency decreases
Solution Approach 1:
The invention extracts and eliminates deadlegs from the chemical delivery system by redesigning the piping architecture. The valve block design routes all conduits to terminate at the outer periphery of the valve block, removing internal deadleg sections where purge gas cannot effectively reach, thereby reducing purge time while maintaining system functionality.
Solution Approach 2:
The invention transitions from a conventional linear piping arrangement to a three-dimensional coaxial valve block structure. Multiple conduits are arranged in a compact 3D configuration within the valve block housing, allowing all conduits to terminate at the outer periphery without creating deadlegs, thus improving purging efficiency while accommodating multiple chemical pathways.
2Device complexity
If conventional valve block design is used, then the system structure is simple, but deadlegs remain in the purgeable piping design decreasing purging efficiency
Solution Approach 1:
The invention segments the valve block into distinct functional regions: a body portion housing the valve mechanisms, and an outer periphery region where all conduit terminations are located. This segmentation allows the design to eliminate deadlegs by ensuring no conduits terminate within the body portion, thereby improving purging efficiency while maintaining manageable structural complexity.
Solution Approach 2:
The invention merges multiple conduit pathways into a single integrated valve block structure rather than using separate piping components. By consolidating multiple conduits into one compact valve block with all terminations at the outer periphery, the design eliminates deadlegs and improves purging efficiency while keeping the overall system structure cohesive and manageable.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly reduces purge time, energy consumption, and hazardous chemical exposure by ensuring full impingement of purge gas on all wetted surfaces, enhancing the overall efficiency and safety of chemical delivery systems.
Implementation Method 1
The use of high pressure, high velocity purge gas
Implementation Method 2
purge gas flows through the second opening (176) located on the angled seventh side (158)... then through the first opening (174)... to exit the inner coaxial portion (183) of the coaxial conduit and back up the outer coaxial portion (185)
Implementation Method 3
The use of vacuum draw and purge gas evacuation is also included in the block valve design
Data Source
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AI summary
A compact valve block for a chemical container wherein the coaxial valve block has a housing that can accommodate three valve control mechanisms thus allowing for quick and effective purging without the need for an additional external conduit, valves, and coaxial injector. The advantage is a greatly reduced amount of wetted surface area inside the valve block leading to a significant decrease in the time it takes to purge a system thus allowing for quicker times to change chemical containers.