Coaxial Through-Package Vertical Interconnect for Ground Separation

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Solution Overview

Problem

Traditional semiconductor packaging substrates rely on single plated through holes (PTHs) for signal routing, which determine performance and area occupancy, limiting efficiency and ground separation.

Innovation Solution

A coaxial approach is implemented where signals are routed within a concentric reference conductor, forming a coaxial structure with through-vias in insulative or conductive semiconductor substrates, reducing area usage and improving performance by using a concentric reference structure and through-vias.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If traditional plated through holes (PTHs) are used for signal routing, then signal transmission is achieved, but area occupancy is large and ground separation is insufficient

Engineering Contradiction:
Improvearea occupancyVSAvoidground separation
Core Design Contradiction:
Area of stationary objectVSReliability

Solution Approach 1:

The patent implements a coaxial structure where the signal conductor is nested within the concentric reference conductor. This nesting arrangement allows the signal path to be contained within the reference conductor structure, effectively reducing the area required for each interconnect while maintaining proper ground separation through the concentric geometry.

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The patent transitions from a planar PTH structure to a three-dimensional coaxial structure. By utilizing the radial dimension within the reference conductor, the design achieves better ground separation and reduced area occupancy compared to traditional two-dimensional PTH layouts.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If traditional PTHs are used for signal routing, then signal transmission is achieved, but performance is limited

Engineering Contradiction:
ImproveperformanceVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The coaxial structure with nested conductors provides superior electromagnetic shielding and controlled impedance characteristics, directly improving signal transmission performance. The nested geometry naturally provides reference planes and reduces crosstalk, enhancing overall device performance despite the increased structural complexity.

Inventive Principle:
Principle #7Nested doll (Nesting)

3Area of stationary object

If PTH pitch is reduced to improve density, then area occupancy decreases, but manufacturing precision requirements increase

Engineering Contradiction:
Improvearea occupancyVSAvoidPTH pitch control
Core Design Contradiction:
Area of stationary objectVSManufacturing precision

Solution Approach 1:

The patent segments the interconnect structure into multiple functional layers: the signal conductor, the concentric reference conductor, and dielectric materials. This segmentation allows each component to be optimized independently, enabling reduced area occupancy while maintaining manufacturable pitch dimensions through modular construction.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method enhances performance and reduces area occupancy by efficiently routing signals within a concentric reference conductor, offering improved signal routing efficiency and ground separation compared to traditional PTH-based substrates.

Implementation Method 1

depositing over the inner surface of the hole in the insulative semiconductor substrate a conductive material to form the concentric reference structure

Methodology Applied
Scientific EffectElectroplating: Electroplating

Implementation Method 2

depositing a first dielectric material in the hole; depositing a second dielectric material on the surface of the first and second sides

Methodology Applied
Scientific EffectPhysical Vapour Deposition: Physical Vapour Deposition

Data Source

PatentUS20230343687A1Through Package Vertical Interconnect and Method of Making Same
Publication Date: 2023.10.26 CHIPLETZ INC
  • US20230343687A1 patent drawing
  • US20230343687A1 patent drawing
  • US20230343687A1 patent drawing

AI summary

In integrated circuit packages, a coaxial pair of signals are routed through a plated through hole between circuitry on one face of the core substrate material with circuitry on an opposing face of the core substrate material. Provided are methods and apparatuses where signals are routed within a concentric reference conductor within traditional package substrates. Methods for forming a hole in the core substrate material through which the coaxial pair of signals is passed on a fine pitch.