Cobalt Superalloy Diaphragm for High Flow Rate
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Solution Overview
Problem
Conventional diaphragm valves used in semiconductor manufacturing face challenges in increasing gas flow rate (Cv value) while maintaining long-term durability, as higher displacement amounts lead to increased stress and reduced durability.
Innovation Solution
A diaphragm with a dome-shaped portion and a flange portion, formed from cobalt-based or nickel-based superalloys with specific composition ranges, featuring a radius of curvature at the boundary portion that satisfies a predetermined relationship with the outer diameter, reducing stress and enhancing durability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the displacement amount of the metal diaphragm is increased to increase gas flow rate, then the flow rate (Cv value) is improved, but the stress applied to the diaphragm is increased which reduces durability
Solution Approach 1:
The patent applies parameter changes by precisely controlling the composition ratios of alloying elements (Co: 30-45%, Ni: 10-20%, Cr: 5-20%, Mo: 3-9%, W: 3-5%, Fe: 1-40%) and the radius of curvature (R≥0.6mm) to optimize the diaphragm's mechanical properties, enabling high flow rate with maintained durability
Solution Approach 2:
The patent uses composite materials by formulating a multi-element cobalt-based or nickel-based superalloy that combines the benefits of different elements: Co and Ni for base strength, Cr and Mo for corrosion resistance, W for high-temperature strength, and Fe for cost-effectiveness and mechanical properties
2Reliability
If a metal diaphragm is used to ensure corrosion resistance in corrosive gas environments, then corrosion resistance is improved, but the displacement amount is limited which restricts gas flow rate
Solution Approach 1:
The patent applies parameter changes by optimizing the composition ranges of corrosion-resistant elements (Cr: 5-20%, Mo: 3-9%) and adjusting the radius of curvature parameter (R≥0.6mm) to enable both high corrosion resistance and sufficient displacement for high flow rate applications
Data Source
AI summary
Provided are a diaphragm, a diaphragm valve, and a method of manufacturing a diaphragm capable of increasing a flow rate (Cv value) of gas without degrading long-term durability even when a displacement amount is increased. A diaphragm (1) has an outer diameter Φ of 10 to 35 mm and includes a dome portion (1D) in a dome shape and a flange portion (1T) formed continuously at a peripheral edge of the dome portion (1D) via a boundary portion (1K), the boundary portion (1K) has a radius of curvature R of 0.6 mm or more on a convex side of the dome portion (1D), and the diaphragm is formed of a cobalt-based super-alloy.