CoFeGeB Magnetic Memory Bottom Layer B2 Structure

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Solution Overview

Problem

Current semiconductor memory devices face challenges in achieving high perpendicular magnetic anisotropy and thermal stability, which are crucial for efficient data storage and operation, particularly in miniaturized electronic devices with low power consumption and high performance requirements.

Innovation Solution

The development of a semiconductor memory device utilizing a CoFeGeB alloy with a changeable magnetization direction, combined with a tunnel barrier layer and a pinned layer, and a bottom layer with a B2 structure to enhance perpendicular magnetic crystalline anisotropy, along with a buffer layer to promote crystal growth, enabling improved electron tunneling and data storage characteristics.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional magnetic memory structures are used, then device simplicity is maintained, but perpendicular magnetic anisotropy and thermal stability are insufficient

Engineering Contradiction:
Improvethermal stabilityVSAvoidlayer structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The magnetic memory structure is segmented into multiple functional layers including buffer layer (105), bottom layer (110) with B2 structure, free layer (120) with CoFeGeB alloy, tunnel barrier layer (130), and pinned layer (140). Each layer performs a specific function to collectively achieve high perpendicular magnetic anisotropy and thermal stability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs composite material structures: CoFeGeB alloy combining multiple elements in the free layer, B2-structured MgO in the bottom layer, and CoFeB alloy in the buffer layer. These composite materials provide enhanced perpendicular magnetic anisotropy and thermal stability compared to conventional single-material structures.

Inventive Principle:
Principle #40Composite materials

2Volume of moving object

If device miniaturization is pursued, then electronic appliance size is reduced, but achieving high perpendicular magnetic anisotropy becomes more difficult

Engineering Contradiction:
Improvedevice sizeVSAvoidperpendicular magnetic anisotropy
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The patent optimizes critical parameters including Ge content in CoFeGeB alloy (less than 10%), thickness ratios between bottom layer and tunnel barrier layer, and crystal structure (B2 structure). These parameter optimizations enable high perpendicular magnetic anisotropy in miniaturized devices where conventional structures fail.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention introduces localized structural features: B2-structured MgO bottom layer with specific crystal orientation, CoFeGeB alloy composition optimized for perpendicular magnetization, and controlled thickness ratios. These local quality enhancements ensure high perpendicular magnetic anisotropy even as overall device dimensions are reduced.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the thermal stability and data storage characteristics of the semiconductor memory device, leading to improved performance and operation in miniaturized electronic devices.

Implementation Method 1

a tunnel barrier layer positioned over the free layer, and configured for enabling electron tunneling

Methodology Applied
Scientific EffectElectron tunneling:

Implementation Method 2

a bottom layer positioned under the free layer, and having a B2 structure to improve a perpendicular magnetic crystalline anisotropy of the free layer

Methodology Applied
Scientific EffectPerpendicular magnetic crystalline anisotropy: Anisotropy

Implementation Method 3

a free layer comprising CoFeGeB alloy, and having a changeable magnetization direction that is perpendicular to the free layer

Methodology Applied
Scientific EffectMagnetization switching: Magnetism

Implementation Method 4

a buffer layer positioned under the bottom layer, and having a BCC structure to promote crystal growth of the bottom layer

Methodology Applied
Scientific EffectCrystal growth: Crystallisation

Data Source

PatentUS9865803B2Electronic device and method for fabricating the same
Publication Date: 2018.01.09 SK HYNIX INC
  • US9865803B2 patent drawing
  • US9865803B2 patent drawing
  • US9865803B2 patent drawing

AI summary

Provided is an electronic device including a semiconductor memory. The semiconductor memory may include: a free layer comprising CoFeGeB alloy, and having a changeable magnetization direction that is perpendicular to the free layer; a tunnel barrier layer positioned over the free layer, and configured for enabling electron tunneling; a pinned layer positioned over the tunnel barrier layer, and having a pinned magnetization direction that is perpendicular to the pinned layer; and a bottom layer positioned under the free layer, and having a B2 structure to improve a perpendicular magnetic crystalline anisotropy of the free layer.