Coherence Imaging Calibration for Precise Laser Beam Registration
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Solution Overview
Problem
Existing coherence imaging (CI) systems for high-energy beam processing applications face challenges in achieving accurate and precise registration to the processing laser, requiring time-consuming manual calibration procedures that are specific to each laser processing station and sensitive to environmental changes, necessitating improved registration accuracy, precision, and automation.
Innovation Solution
A system and method for static and dynamic calibration of CI measurement systems, using a material processing system controller to generate a laser processing beam for calibration measurements, and a CI system controller to align the CI measurement system relative to physical modifications or localized process radiation, enabling automated alignment adjustments based on calibration outputs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual calibration procedures are used for CI system alignment, then registration accuracy can be improved, but calibration time and operational complexity increase significantly
Solution Approach 1:
The system performs self-calibration by automatically comparing CI measurement beam positions with processing laser beam positions using physical modifications (marks) or process radiation as references. The CI system independently determines its own alignment parameters without requiring external manual intervention, thus achieving accurate registration while minimizing calibration time.
Solution Approach 2:
The calibration process uses feedback from detected physical modifications or process radiation to automatically adjust and refine the alignment between the CI measurement beam and processing laser beam. The system continuously monitors the spatial relationship and makes real-time corrections to achieve precise registration.
2Measurement precision
If manual calibration procedures are used for CI system alignment, then registration accuracy can be improved, but device complexity and operational difficulty increase
Solution Approach 1:
The CI system automatically performs its own alignment calibration by detecting references (physical marks or process radiation) and computing its position relative to the processing laser beam. This self-service capability eliminates the need for trained professionals to perform complex manual calibration procedures, making the system easy to operate while maintaining high registration accuracy.
Solution Approach 2:
The system replaces manual mechanical alignment procedures with automated optical detection and computational methods. Instead of physically adjusting components by hand, the system uses optical detection of references and algorithmic calculation to achieve precise alignment, thereby simplifying operation while maintaining accuracy.
3Reliability
If strict registration requirements are imposed, then measurement usefulness is improved, but calibration time and professional intervention requirements increase
Solution Approach 1:
The system automatically achieves the required registration accuracy by self-calibrating using detected references. This self-service approach ensures that strict registration requirements are met while eliminating the need for repeated professional interventions and iterative adjustments, thereby maintaining measurement reliability without sacrificing calibration efficiency.
Solution Approach 2:
The system performs preliminary calibration actions by detecting references and establishing alignment before actual measurement processes begin. This preliminary self-calibration ensures that registration requirements are satisfied in advance, enabling immediate productive operation without requiring subsequent professional intervention or iterative refinement.
Data Source
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AI summary
Systems and methods for static and dynamic calibration may be used to provide alignment of a measurement beam from a coherence imaging (CI) measurement system relative to a processing beam from a material processing system. In these systems and methods, a calibration measurement output may be obtained from the CI measurement system and/or from an auxiliary sensor. Future measurements performed by the CI measurement system may be modified based on, at least in part, the calibration measurement output.