Cohesive Irradiation Module for Refraction-Immune Position Measurement

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Solution Overview

Problem

Existing position measurement systems using Michelson interferometers face challenges in accurately measuring position changes due to refraction index fluctuations in air, which affect the precision of measurements and require difficult corrections.

Innovation Solution

An irradiation module configured as a cohesive, light-conductive body with a beam-splitting surface, optical diffraction grating, and reflection surface, where the beam path runs continuously through solid material or enclosed air chambers, minimizing the impact of air refraction index fluctuations by ensuring the optical path lengths remain consistent and independent of ambient air effects.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If traditional Michelson interferometer setup with separate optical components is used, then the device complexity is reduced and ease of manufacture is improved, but measurement precision deteriorates due to refraction index fluctuations in air

Engineering Contradiction:
Improveposition measurement accuracyVSAvoidoptical path configuration
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent combines the beam splitter, diffraction grating, and reflection surface into a single integrated irradiation module made of light-conductive material. This merging eliminates the need for separate optical components and their associated air paths, thereby improving measurement precision by eliminating refraction index fluctuations while managing device complexity through integration.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent creates an inert optical environment by enclosing the optical path within a light-conductive cohesive body. This effectively removes the optical beams from contact with ambient air, eliminating refraction index fluctuations caused by air temperature and pressure changes, thus improving measurement accuracy.

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

2Measurement precision

If optical components are arranged in separate air paths, then ease of operation and alignment is improved, but measurement precision deteriorates due to air refraction index fluctuations

Engineering Contradiction:
Improveposition measurement accuracyVSAvoidoptical alignment
Core Design Contradiction:
Measurement precisionVSEase of operation

Solution Approach 1:

By merging all optical components into a single light-conductive cohesive body, the patent eliminates the need for separate air paths and their associated alignment requirements. The optical beams travel continuously through the light-conductive material, improving measurement precision while reducing alignment complexity.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The light-conductive cohesive body acts as an intermediary medium that replaces air as the transmission medium for optical beams. This intermediary eliminates refraction index fluctuations while providing a stable, controlled optical path that simplifies operation and alignment.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Measurement precision

If correction measurements for refraction index fluctuations are implemented, then measurement precision can be maintained, but device complexity and difficulty of detecting and measuring increases

Engineering Contradiction:
Improveposition measurement accuracyVSAvoidcorrection system
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent extracts the optical beams from the problematic air environment by routing them through a light-conductive cohesive body. This extraction eliminates the source of refraction index fluctuations, improving measurement precision without requiring complex correction systems to compensate for air-induced errors.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent converts the harmful effect of air refraction index fluctuations into a benefit by using the light-conductive cohesive body to guide the optical beams. The material's light-conductive properties are exploited to create a stable optical path that is immune to air temperature and pressure changes, thereby improving measurement accuracy.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables highly accurate position measurements that are not affected by air refraction index fluctuations, improving measurement precision and reducing errors caused by power fluctuations and tilts in reflectors.

Implementation Method 1

a beam-splitting surface arranged within the irradiation module for splitting an incoming measuring beam into two partial beams

Methodology Applied
Scientific EffectBeam splitting: Reflection

Implementation Method 2

an optical diffraction grating for interaction with a first of the two partial beams

Methodology Applied
Scientific EffectDiffraction: Diffraction

Implementation Method 3

a reflection surface for reflecting the second partial beam

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 4

The irradiation module is light-conductive and is configured as a cohesive body... the beam path runs continuously through solid material or enclosed air chambers, minimizing the impact of air refraction index fluctuations

Methodology Applied
Scientific EffectLight conduction: Refraction

Data Source

PatentUS9678436B2Irradiation module for a measuring apparatus
Publication Date: 2017.06.13 CARL ZEISS SMT GMBH
  • US9678436B2 patent drawing
  • US9678436B2 patent drawing
  • US9678436B2 patent drawing

AI summary

An irradiation module for a measuring apparatus is provided. The irradiation module is light-conductive, is configured as a cohesive body and comprises a beam-splitting surface arranged within the irradiation module for splitting an incoming measuring beam into two partial beams. Furthermore, the irradiation module comprises an optical diffraction grating for interaction with a first of the two partial beams and a reflection surface for reflecting the second partial beam.