Coil Actuated Pressure Sensor With Deflectable Substrate

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Solution Overview

Problem

Existing pressure sensors lack an effective method to accurately detect pressure differentials using magnetic field sensors, which limits their ability to measure deformation-induced changes in distance between the sensor and the substrate.

Innovation Solution

A pressure sensor design incorporating a conductive substrate with a deformable thin portion and a magnetic field sensor, where an AC coil induces eddy currents in the substrate, generating a reflected magnetic field that changes with deformation, allowing the magnetic field sensing elements to detect these changes and correlate them to pressure differentials.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a magnetic field sensor is used to detect pressure differentials, then the sensor can detect motion or position, but it lacks the ability to accurately measure deformation-induced changes in distance between the sensor and the substrate

Engineering Contradiction:
Improvepressure differential measurement accuracyVSAvoiddetection effectiveness
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

A conductive substrate is introduced as an intermediary between the magnetic field sensor and the pressure differential. The substrate deforms in response to pressure changes, and this deformation is detected by the magnetic field sensor through changes in the reflected magnetic field signal. This intermediary enables the sensor to indirectly measure pressure differentials with high precision.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces direct mechanical contact measurement with a magnetic field-based detection system. Instead of using mechanical sensors that physically contact the substrate, a magnetic field sensor detects substrate deformation through changes in the reflected magnetic field, eliminating mechanical coupling and improving measurement accuracy.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Measurement precision

If the magnetic field sensor is positioned close to the thin portion of the substrate, then the sensitivity to deformation increases, but the complexity of the device structure increases

Engineering Contradiction:
Improvedeformation detection sensitivityVSAvoidsensor positioning complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The conductive substrate serves multiple functions: it acts as the pressure-sensitive element that deforms in response to pressure differentials, serves as a conductor for generating the reflected magnetic field, and provides a structural platform for positioning the magnetic field sensor. This multi-functionality reduces overall device complexity while maintaining high sensitivity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enables precise measurement of pressure changes by varying the distance between the substrate and the magnetic field sensor, enhancing the sensor's accuracy and responsiveness to pressure differentials.

Implementation Method 1

a magnetic field produced by the at least one coil induces eddy currents in the thin portion of the substrate that generate a reflected magnetic field

Methodology Applied
Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 2

induces eddy currents in the thin portion of the substrate that generate a reflected magnetic field

Methodology Applied
Scientific EffectEddy currents: Eddy Currents

Implementation Method 3

At least one magnetic field sensing element is disposed proximate to the at least one coil and to the thin portion of the substrate and configured to generate a magnetic field signal in response to the reflected magnetic field

Methodology Applied
Scientific EffectMagnetic field sensing: Magnetic Field

Data Source

PatentUS11061084B2Coil actuated pressure sensor and deflectable substrate
Publication Date: 2021.07.13 ALLEGRO MICROSYSTEMS LLC
  • US11061084B2 patent drawing
  • US11061084B2 patent drawing
  • US11061084B2 patent drawing

AI summary

A pressure sensor includes a conductive substrate having a cavity which forms a thin portion that can be deformed by a pressure differential. A magnetic field sensor has at least one coil responsive to a changing coil drive signal and positioned proximate to the thin portion of the substrate that induces eddy currents in the thin portion that generate a reflected magnetic field. Magnetic field sensing elements detect the reflected magnetic field and generate a magnetic field signal. The magnetic field sensor is positioned so that deformation of the thin portion of the substrate causes a distance between the thin portion of the substrate and the magnetic field sensor to change.