Electromagnetic Coil Cooling Channels for Uniform Thermal Control

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Solution Overview

Problem

Existing methods for cooling electromagnetic coils in electron beam systems result in non-uniform cooling, leading to thermal expansion and misalignment of components, which affects calibration and image quality.

Innovation Solution

A cooling structure surrounding the electromagnetic coil with alternating first and second cooling channels, each receiving cooling fluid in opposite directions, ensures uniform cooling by covering the coil's entire perimeter.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If a copper plate with cooling tubes is bonded to one side of the coil, then cooling is provided, but non-uniform cooling occurs because the copper plate only contacts one side of the coil

Engineering Contradiction:

Improvecoil temperatureVSAvoidcooling uniformity

Core Design Contradiction:

TemperatureVSManufacturing precision

Solution Approach 1:

The cooling system is segmented into multiple independent cooling channels (first cooling channel, second cooling channel, third cooling channel) that are distributed around the coil perimeter. Each channel receives cooling fluid independently, allowing separate control and optimization of cooling in different regions, thereby achieving uniform cooling across the entire coil surface.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The cooling approach transitions from a single-sided planar cooling (copper plate on one side) to a multi-dimensional circumferential cooling system. The cooling channels are arranged alternately around the entire perimeter of the coil, providing cooling from multiple directions and dimensions, which eliminates the non-uniformity caused by single-sided cooling.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Temperature

If cooling fluid flows through a single cooling channel, then cooling is provided, but non-uniform cooling occurs because the outlet temperature is higher than the inlet temperature

Engineering Contradiction:

Improvecoil temperatureVSAvoidcooling uniformity

Core Design Contradiction:

TemperatureVSManufacturing precision

Solution Approach 1:

The single cooling channel is divided into multiple segmented cooling channels (first, second, third cooling channels) arranged alternately around the coil. Each channel receives cooling fluid at relatively uniform temperature from separate inlets, and the segmented arrangement ensures that heat is removed uniformly from different portions of the coil, compensating for the temperature rise that occurs along the flow path.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Instead of having cooling fluid flow through a single channel from inlet to outlet (creating a temperature gradient), the system inverts the approach by providing multiple independent cooling channels with separate inlets. This allows the cooling fluid to enter each channel at a relatively uniform temperature, and the alternating arrangement of channels around the coil ensures uniform heat removal throughout the coil perimeter.

Inventive Principle:

Principle #13The other way round (Inversion)

3Loss of energy

If the coil is cooled, then heat transfer to housing is reduced, but thermal expansion and misalignment occur due to non-uniform cooling

Engineering Contradiction:

Improveheat transfer to housingVSAvoidcomponent alignment

Core Design Contradiction:

Loss of energyVSReliability

Solution Approach 1:

The cooling system is divided into multiple segmented channels arranged alternately around the coil, allowing uniform heat removal from all portions of the coil. This uniform cooling prevents localized thermal gradients that would cause differential thermal expansion, thereby maintaining component alignment and reliability while still reducing overall heat transfer to the housing.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The system uses fluid-based cooling (cooling fluid flowing through cooling channels) to efficiently remove heat from the coil. The hydraulic cooling system provides controlled, uniform heat removal that prevents thermal distortion, maintaining component alignment while reducing heat transfer to surrounding housing structures.

Inventive Principle:

Principle #29Pneumatics and hydraulics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides uniform cooling, reducing thermal expansion and maintaining component alignment, thereby improving calibration stability and image quality.

Implementation Method 1

The first cooling fluid and the second cooling fluid may cool the electromagnetic coil

Methodology Applied

Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

When the coil is powered on, a resulting magnetic field in the aperture of the coil focuses passing electrons into a narrow beam

Methodology Applied

Scientific EffectElectromagnetic induction: Electromagnetic Induction

Data Source

PatentUS12462968B2Systems and methods for uniform cooling of electromagnetic coil

Publication Date: 2025.11.04 KLA CORP

AI summary

A system and method for uniform cooling of an electromagnetic coil are provided. The system includes an electromagnetic coil, a cooling structure, and a cooling fluid source. The cooling structure surrounds the entirety of the perimeter of the electromagnetic coil, and includes a first cooling channel and a second cooling channel arranged alternately about the electromagnetic coil. The cooling fluid source is configured to deliver a first cooling fluid to the first cooling channel and a second cooling fluid to the second cooling channel, such that the first cooling fluid and the second cooling fluid cool the electromagnetic coil.