Coil-Integrated Yoke Manufacturing for Precise Electron Beam Deflection
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Solution Overview
Problem
Existing electron beam deflectors in scanning electron microscopes face challenges in accurately deflecting electron beam orbits due to disturbances in magnetic field lines caused by non-right-angled corners when coils are embedded in yokes.
Innovation Solution
A coil-integrated-type yoke manufacturing method involving sequential insertion of a molding agent, coil, and spacer into a groove, followed by polishing to ensure a 90-degree angle between the yoke surface and groove side, and curing under pressure to maintain structural integrity and prevent corner damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a coil is embedded in a yoke by conventional methods, then the manufacturing process is simple, but the corner angles become non-right-angled causing disturbance in magnetic field lines
Solution Approach 1:
The groove is formed with a predetermined depth and shape before coil embedding, and the yoke surface is polished in advance to ensure a precise 90-degree angle. This preliminary preparation prevents corner angle distortion during the coil embedding process, maintaining magnetic field line integrity without requiring complex post-processing.
Solution Approach 2:
A molding agent is introduced as an intermediary substance during the coil embedding process. This molding agent fills the groove and secures the coil in position while maintaining the precise 90-degree corner angles of the groove, preventing distortion that would otherwise occur during embedding.
2Manufacturing precision
If the yoke surface is polished after coil embedding, then the surface finish is improved, but the corner angles become non-right-angled due to polishing pressure
Solution Approach 1:
The yoke surface is polished before coil embedding rather than after. This preliminary polishing ensures that the corner angles are precisely 90 degrees before the coil and molding agent are introduced. By performing the polishing operation in advance, the process avoids the problem of polishing pressure distorting the corner angles after the coil is in place.
3Strength
If the groove depth is increased to embed the coil deeper, then the coil is more securely held, but the corner angles become non-right-angled
Solution Approach 1:
The groove is designed with specific local characteristics: a predetermined depth that provides sufficient coil holding strength, and a precise 90-degree corner angle configuration. The groove dimensions and geometry are locally optimized to simultaneously achieve secure coil embedding and maintain accurate corner angles for undisturbed magnetic field lines.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method allows for accurate electron beam deflection by ensuring undisturbed magnetic field lines, enabling precise orbit deflection in electron beam applications.
Implementation Method 1
a magnetic field deflector that deflects an electron beam by means of a magnetic field generated by supplying electricity to a coil embedded in a yoke
Implementation Method 2
a step of polishing the first surface of the yoke and the spacer together
Data Source
AI summary
A coil-integrated-type yoke for realizing a deflector that can accurately deflect an orbit of an electron beam and a manufacturing method thereof are provided. There is provided a manufacturing method of a coil-integrated-type yoke, the manufacturing method including: a step of sequentially inserting a molding agent, a coil, and a spacer into a groove heading from a first surface toward a second surface of the yoke; and a step of polishing the first surface of the yoke and the spacer together.