Stretchable Coil Pipe for Supercritical Drying Backflow Prevention
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Solution Overview
Problem
The existing substrate treating apparatuses using supercritical drying processes face issues with pipe damage and backflow due to the fixed position of pipes during vertical movement, which can lead to mechanical stress and condensation-related contamination.
Innovation Solution
A substrate treating apparatus with a stretchable coil pipe that moves vertically with the housing, allowing for tension and compression to prevent damage and backflow, and a design where the coil pipe's cross-sectional area is smaller than the connected pipes to facilitate easy expansion and contraction, with the upper end positioned upstream to prevent condensation-induced backflow.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a fixed-position pipe is used during vertical movement of the housing, then the pipe structure is simple, but the pipe is damaged or transformed due to mechanical stress
Solution Approach 1:
The patent applies the dynamics principle by making the pipe movable rather than fixed. The pipe is coupled to the second body and moves vertically together with it, allowing the pipe to dynamically adapt to the vertical movement of the housing during substrate loading and unloading processes. This eliminates mechanical stress and transformation that would occur with a fixed-position pipe.
2Stability of the object's composition
If the pipe position is fixed during vertical movement, then the pipe connection is stable, but backflow occurs due to condensation of supercritical fluid
Solution Approach 1:
The patent applies dynamics by enabling the pipe to move vertically with the second body, maintaining stable connection throughout the movement range. This dynamic coupling prevents the pipe from remaining stationary while the housing moves, thereby preventing condensation-induced backflow that would occur with fixed-position piping.
3Device complexity
If a rigid pipe is used, then the pipe structure is simple, but it cannot accommodate vertical movement without damage
Solution Approach 1:
The patent transforms the rigid pipe into a dynamic, movable pipe that is coupled to the second body. This allows the pipe to accommodate vertical movement during substrate loading and unloading, providing the necessary adaptability while maintaining structural simplicity through a straightforward coupling mechanism.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively prevents pipe damage and backflow during supercritical drying treatments by allowing the pipe to stretch and contract with the housing movement, minimizing mechanical stress and contamination risks.
Implementation Method 1
the pipe is a stretchable pipe that is stretchable and contractible according to the vertical movement of the second body
Implementation Method 2
a pipe which is coupled with the second body and in which a fluid flows
Data Source
AI summary
The present invention provides a substrate treating apparatus, including: a housing including a first body and a second body which are combined with each other to provide a treatment space in which a substrate is treated; an actuator which moves the second body in a vertical direction with respect to the first body to seal or open the treatment space; and a pipe which is coupled with the second body and in which a fluid flows, in which the pipe is a stretchable pipe that is stretchable and contractible according to the vertical movement of the second body.