Coil Actuated Pressure Sensor with Deformable Substrate

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Solution Overview

Problem

Magnetic field sensors face challenges in accurately determining the position of a target at larger gaps, leading to reduced precision in detection.

Innovation Solution

A pressure sensor design incorporating a deformable substrate with coils that produce changing magnetic fields, inducing eddy currents in conductive materials to generate reflected magnetic fields, which are detected by magnetic field sensing elements, allowing for precise distance measurement and pressure sensing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If a magnetic field sensor is used to detect a target at a relatively large gap, then the detection range is improved, but the measurement precision deteriorates

Engineering Contradiction:

Improvedetection rangeVSAvoidposition detection accuracy

Core Design Contradiction:

Volume of moving objectVSMeasurement precision

Solution Approach 1:

A deformable substrate is introduced as an intermediary between the magnetic field sensor and the target. The substrate deforms in response to pressure changes, bringing the sensor closer to the target dynamically, thus maintaining high measurement precision while enabling detection over a larger effective range through the substrate's mechanical compliance

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The system transitions from a static sensor-target arrangement to a dynamic configuration where the deformable substrate continuously adjusts the gap distance between the sensor and target in response to pressure changes, optimizing the detection precision adaptively across different operating conditions

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enhances the accuracy of distance and pressure measurement, enabling high precision detection even at larger gaps, with the deformable substrate and eddy current mechanism providing reliable and precise signals for fluid pressure changes.

Implementation Method 1

at least one coil supported by the substrate and responsive to a changing coil drive signal to produce a changing magnetic field

Methodology Applied

Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 2

the changing magnetic field produces eddy currents within the conductive material that generate a reflected magnetic field

Methodology Applied

Scientific EffectEddy currents: Eddy Currents

Data Source

PatentUS10955306B2Coil actuated pressure sensor and deformable substrate

Publication Date: 2021.03.23 ALLEGRO MICROSYSTEMS LLC

AI summary

A pressure sensor comprises a deformable substrate, at least one coil supported by the substrate and responsive to a changing coil drive signal to produce a changing magnetic field, a fluid chamber having a first wall formed by the substrate and a second wall formed by a conductive material and positioned proximate to the at least one coil so that the changing magnetic field produces eddy currents within the conductive material that generate a reflected magnetic field, and at least one magnetic field sensing element configured to detect the reflected magnetic field and produce a signal responsive to a distance between the magnetic field sensing element and the second wall. The substrate is deformable by fluid pressure within the fluid chamber and the deformation of the substrate changes the distance between the magnetic field sensing element and the second wall.