Vibration Isolator Coil Spring Horizontal Shift Prevention
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Solution Overview
Problem
Existing vibration isolation systems with coil springs face issues during height adjustment, as they can generate horizontal forces leading to undesirable horizontal shifts of the anti-vibration mounted load, which is particularly problematic in active systems like those used in the semiconductor industry, causing misalignment of non-contact actuators.
Innovation Solution
A vibration isolator design where the coil spring is stiffly coupled to the base or load in the horizontal direction, with additional components like flexible rods or leaf springs providing high horizontal stiffness, ensuring that the load does not shift horizontally during height adjustment, and allowing for easy adaptation of natural frequencies across isolators.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If height adjustment is performed using a nut on a threaded rod, then the vibration isolation system can be adjusted in height, but horizontal forces are generated causing horizontal shift of the load
Solution Approach 1:
A guide element is introduced as an intermediary component between the adjusting element and the coil spring. This guide element allows vertical movement while constraining horizontal movement, thereby mediating between the height adjustment function and the prevention of horizontal shift. The guide element translates the rotational motion of the adjusting element into pure vertical translation without generating horizontal forces.
Solution Approach 2:
The vibration isolator is segmented into distinct functional components: a base, a coil spring for vertical vibration isolation, an adjusting element for height control, and a guide element for horizontal constraint. This segmentation allows each component to perform its specific function independently, with the guide element specifically addressing the horizontal shift problem while the coil spring handles vertical isolation.
2Reliability
If the coil spring is made flexible for vibration isolation, then vertical vibration isolation is achieved, but horizontal stability is reduced
Solution Approach 1:
The guide element provides different mechanical properties in different directions: it allows vertical movement (flexible in vertical direction) while providing horizontal constraint (rigid in horizontal direction). This local differentiation of mechanical properties enables the system to maintain vibration isolation performance while achieving horizontal stability.
Solution Approach 2:
The guide element dynamically adapts to the operational requirements by allowing vertical displacement for vibration isolation while maintaining horizontal positioning stability. The guide element's geometry enables it to accommodate vertical motion while preventing horizontal shifts, effectively providing direction-dependent mechanical behavior.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design allows for height adjustment without horizontal displacement of the anti-vibration mounted load, maintaining system stability and preventing misalignment of actuators, thus enhancing the effectiveness of vibration isolation in active systems.
Implementation Method 1
a coil spring that is effective at least in a vertical direction
Implementation Method 2
Adjustment is for example effected by means of an adjusting element in form of a nut which is guided on a threaded rod
Implementation Method 3
via a control loop at least one actuator is controlled, which actively counteracts vibrations. Especially non-contact force actuators are used as the actuator, in particular based on the Lorentz principle
Data Source
AI summary
The invention relates to a vibration isolator that includes a coil spring. In a horizontal direction, the coil spring is stiffly coupled to the base or to the load to be isolated.


