Coined Lid Air-Cavity Package for GaN Top-Side Cooling

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Solution Overview

Problem

High-power radio frequency (RF) devices based on gallium nitride (GaN) technology face challenges in effectively managing heat dissipation due to limited bottom-side cooling through package substrates, leading to thermal resistance and reduced device reliability.

Innovation Solution

An air-cavity package design with a coined lid that incorporates heat spreaders and a sealed air cavity for top-side cooling, utilizing engineered nano copper paste for thermal expansion matching and a lid sealing component to encapsulate flip-chip dies, enhancing thermal conductivity and electrical performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If bottom-side cooling through package substrate is used, then device mounting is simplified, but heat dissipation efficiency is insufficient leading to high thermal resistance

Engineering Contradiction:
Improvedevice mounting simplicityVSAvoidthermal resistance
Core Design Contradiction:
Ease of manufactureVSTemperature

Solution Approach 1:

The cooling solution is segmented into two independent paths: bottom-side cooling through the package substrate and top-side cooling through the coined lid with heat spreaders. This allows each cooling path to be optimized separately and work together to solve the thermal management problem.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention transitions from single-direction (bottom-side) cooling to multi-directional cooling by adding top-side cooling capability through the coined lid structure with heat spreaders, effectively utilizing both vertical dimensions for heat dissipation.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Power

If gate spacing of GaN devices is reduced to increase power output, then breakdown voltage and maximum output power are enhanced, but concentrated heat flux increases leading to thermal management challenges

Engineering Contradiction:
Improvemaximum output powerVSAvoidconcentrated heat flux
Core Design Contradiction:
PowerVSTemperature

Solution Approach 1:

The invention extracts heat from the concentrated heat flux regions by positioning heat spreaders directly over the active regions of the GaN devices. This removes the thermal problem from the device structure and handles it separately through dedicated heat spreading components.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The coined lid structure provides localized cooling solutions with heat spreaders positioned specifically over the high heat flux active regions of the GaN devices, rather than using a uniform cooling approach across the entire package.

Inventive Principle:
Principle #3Local quality

3Reliability

If air-cavity configuration is used, then dielectric losses are reduced and electrical performance is improved, but thermal management complexity increases

Engineering Contradiction:
Improveelectrical performanceVSAvoidpackaging design complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The coined lid structure serves multiple functions simultaneously: it provides the air-cavity configuration for reduced dielectric losses, implements top-side cooling through heat spreaders, and offers mechanical protection for the devices. This multi-functionality reduces overall system complexity despite the advanced features.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The coined lid is constructed from composite materials that provide both the required electrical properties for air-cavity operation and the thermal conductivity necessary for effective heat spreading, combining multiple material functions in a single component.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design provides efficient top-side cooling and improved thermo-mechanical reliability, reducing thermal resistance and enhancing electrical performance at high frequencies by dissipating heat through a sealed air cavity and heat spreaders.

Implementation Method 1

The at least one heat spreader is positioned over, aligned with, and thermally coupled to the at least one flip-chip die

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

the at least one heat spreader is formed from an engineered nano copper paste, which is capable of being customized in a coefficient of thermal expansion (CTE), in a range of 5-16 ppm

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentUS20250329603A1CTE matched coined lid for air-cavity package top-side cooling
Publication Date: 2025.10.23 QORVO US INC
  • US20250329603A1 patent drawing
  • US20250329603A1 patent drawing
  • US20250329603A1 patent drawing

AI summary

The present disclosure relates to an air-cavity package including a base assembly with a package substrate and a flip-chip die attached to the package substrate, and a coined lid over the base assembly and including a lid body and a heat spreader. The lid body includes a lid base and a lid wall protruding from a periphery of the lid base towards the package substrate. The heat spreader extends through the lid base, protrudes from the lid base towards the package substrate, and is positioned over, aligned with, and thermally coupled to the flip-chip die. A lid sealing component seals the lid wall to the package substrate. Herein, a recess, which is defined underneath the lid base, surrounding the heat spreader, and surrounded by the lid wall, and a gap surrounding the flip-chip die combine to form a sealed air cavity. The flip-chip die is encapsulated within the air cavity.