Cold Plasma Jet Array via Orifice Substrate

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Solution Overview

Problem

Current methods for generating cold plasma jets at atmospheric pressure are limited by the small size of the jets produced, requiring complex and expensive multi-electrode and multi-generator systems to treat larger surfaces, which are not suitable for targets with varying dimensions and aspect ratios.

Innovation Solution

A device and method that utilize a single plasma source and substrate with multiple orifices to generate a plurality of cold plasma jets, allowing treatment of targets of any size or shape, including dielectric or conductive materials, by directing a primary plasma jet through the orifices to produce secondary plasma jets, reducing the complexity and cost of the system.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a single plasma source is used to treat larger surfaces, then the system complexity is reduced, but the treatment area coverage is insufficient

Engineering Contradiction:
Improvesystem complexityVSAvoidtreatment area coverage
Core Design Contradiction:
Device complexityVSArea of stationary object

Solution Approach 1:

The invention divides a single plasma jet into multiple smaller jets by passing it through a substrate with multiple orifices. This segmentation allows one plasma source to effectively cover a larger treatment area, resolving the contradiction between system complexity and treatment area coverage.

Inventive Principle:
Principle #1Segmentation

2Area of stationary object

If multiple plasma jets are generated using multi-electrode and multi-generator systems, then the treatment surface area is increased, but the device complexity and cost increase

Engineering Contradiction:
Improvetreatment surface areaVSAvoiddevice complexity
Core Design Contradiction:
Area of stationary objectVSDevice complexity

Solution Approach 1:

The invention merges multiple plasma jets into a single plasma source that is divided through a substrate with multiple orifices. This combining approach achieves multi-jet treatment capability while maintaining a single generator system, thereby increasing treatment surface area without proportionally increasing device complexity.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The substrate with multiple orifices serves as a universal component that can distribute a single plasma jet to multiple treatment zones. This multi-functional element allows one plasma source to perform the work of multiple sources, increasing treatment area while controlling system complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Area of stationary object

If multiple plasma jets are generated using multi-electrode and multi-generator systems, then the treatment surface area is increased, but the system cost increases

Engineering Contradiction:
Improvetreatment surface areaVSAvoidsystem cost
Core Design Contradiction:
Area of stationary objectVSEase of manufacture

Solution Approach 1:

The invention merges multiple plasma jets into a single plasma source that is divided through a substrate with multiple orifices. This combining approach achieves multi-jet treatment capability while maintaining a single generator system, thereby increasing treatment surface area without proportionally increasing device complexity.

Inventive Principle:
Principle #5Merging (Combining)

4Area of stationary object

If the plasma jet is scanned over the surface to treat larger areas, then the treatment area coverage is increased, but the device complexity increases

Engineering Contradiction:
Improvetreatment area coverageVSAvoiddevice complexity
Core Design Contradiction:
Area of stationary objectVSDevice complexity

Solution Approach 1:

The invention divides a single plasma jet into multiple smaller jets by passing it through a substrate with multiple orifices. This segmentation allows one plasma source to effectively cover a larger treatment area, resolving the contradiction between system complexity and treatment area coverage.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the treatment of targets with diverse dimensions and aspect ratios using a single generator and plasma gas source, significantly reducing gas consumption and system complexity, while allowing for precise control over plasma distribution and application.

Implementation Method 1

A plasma is a phase of matter comprising charged particles, ions and electrons. Typically, it is an ionized gas, that is, a gas comprising free electrons which are not bound to an atom or a molecule.

Methodology Applied
Scientific EffectPlasma: Plasma

Implementation Method 2

The invention relates more particularly to cold plasmas at atmospheric pressure.

Methodology Applied
Scientific EffectCold plasma:

Implementation Method 3

a jet of cold plasma at atmospheric pressure using a plasma source (10)

Methodology Applied
Scientific EffectJet: Jet

Data Source

PatentEP3225083B1Method and device for generating a plurality of cold-plasma jets at atmospheric pressure
Publication Date: 2021.03.24 INEL
  • EP3225083B1 patent drawingFigure 1
  • EP3225083B1 patent drawingFigure 2~3a
  • EP3225083B1 patent drawingFigure 3b~3c

AI summary

The invention relates to a method (S) for generating a plurality of cold-plasma jets at atmospheric pressure in order to treat a target (2), wherein said method includes the following steps: producing (S1) a primary cold-plasma jet (3) at atmospheric pressure using a plasma source (10); placing (S2) a substrate (20, 21, 30, 32, 34) near the target (2) to be treated, said substrate (20, 21, 30, 32, 34) including at least two through-holes; and passing (S3) the plasma through the through-holes (22) of the substrate (20) such as to generate at least two secondary cold-plasma jets (4) at atmospheric pressure.