Integrated Cold Plate Bonding for Low-Resistance Chip Cooling

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Solution Overview

Problem

Existing cooling systems for microelectronic devices suffer from reduced efficiency due to high thermal resistance at interfacial boundaries and within thermal interface materials, leading to increased chip temperatures and reduced performance.

Innovation Solution

The integration of a cold plate with a semiconductor device using direct or hybrid bonding techniques, eliminating intervening adhesives and enhancing heat transfer through coolant channels, thereby reducing thermal resistance and improving cooling efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If thermal interface materials are used to facilitate heat transfer between chip and heat dissipation device, then thermal coupling is enhanced, but the combined thermal resistance of the interface boundaries and the thermal interface material itself inhibits heat transfer

Engineering Contradiction:
Improvethermal couplingVSAvoidheat transfer efficiency
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent removes the thermal interface material from the heat transfer path between the cold plate and semiconductor device. By directly bonding the cold plate to the device, the thermal interface material and its associated thermal resistance are extracted from the system, eliminating the energy loss caused by thermal resistance at interfaces.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent merges the cold plate and semiconductor device into a single integrated structure through direct or hybrid bonding. This combining eliminates the separate thermal interface material layer and reduces the number of interfacial boundaries, thereby reducing cumulative thermal resistance and improving heat transfer efficiency.

Inventive Principle:
Principle #5Merging (Combining)

2Reliability

If multiple components are placed between heat dissipating sources and heat dissipation devices, then cooling functionality is provided, but system thermal resistance increases cumulatively along heat transfer paths

Engineering Contradiction:
Improvecooling functionalityVSAvoidsystem thermal resistance
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent extracts and removes unnecessary intermediate components from the heat transfer path. By using direct bonding between the cold plate and semiconductor device, intermediate thermal interface materials and their associated thermal resistances are taken out of the system, reducing cumulative thermal resistance while maintaining cooling functionality.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent applies preliminary action by performing direct bonding between the cold plate and semiconductor device during manufacturing, eliminating the need for separate thermal interface material application and reducing the number of assembly steps. This preliminary integration reduces system thermal resistance from the outset.

Inventive Principle:
Principle #10Preliminary action

3Loss of energy

If conventional cooling systems with multiple components are used, then heat dissipation is achieved, but manufacturing complexity and assembly steps increase

Engineering Contradiction:
Improveheat dissipationVSAvoidsystem assembly
Core Design Contradiction:
Loss of energyVSDevice complexity

Solution Approach 1:

The patent merges the cold plate and semiconductor device into a single integrated structure through direct or hybrid bonding techniques. This merging reduces the number of separate components and assembly steps, simplifying manufacturing while maintaining effective heat dissipation functionality.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The cold plate is designed to serve multiple functions: it provides structural support, enables direct thermal contact with the semiconductor device, and facilitates heat dissipation through integrated coolant channels. This multi-functionality reduces the need for separate components, simplifying the overall system.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly reduces thermal resistance and enhances heat dissipation, maintaining optimal operating temperatures and improving the energy efficiency of semiconductor devices.

Implementation Method 1

enhancing heat transfer through coolant channels, thereby reducing thermal resistance

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

enhancing heat transfer through coolant channels

Methodology Applied
Scientific EffectConvection: Convection

Data Source

PatentUS12412808B1Cold plate and manifold integration for high reliability
Publication Date: 2025.09.09 ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC
  • US12412808B1 patent drawing
  • US12412808B1 patent drawing
  • US12412808B1 patent drawing

AI summary

A device package comprising an integrated cooling assembly. The device package comprises a semiconductor device attached to a substrate and a cold plate attached to the semiconductor device. The cold plate's footprint is larger than the footprint of the semiconductor device so one or more portions of the cold plate extends past the edges of the semiconductor device's footprint. One or more standoffs are disposed adjacent to the semiconductor device to support the one or more portions of the cold plate that extend past the edges of the semiconductor device's footprint.