Collapsible Substrate Support for Batch Processing Footprint Reduction
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Solution Overview
Problem
Conventional batch processing apparatuses occupy excessive space due to their fixed height, which is determined by the number of supports and the spacing between them, limiting the efficiency and cost-effectiveness of substrate processing.
Innovation Solution
A collapsible substrate support system that includes a base linearly movable between processing and transfer positions, with concentric tubular elements and support prongs, allowing the batch processing apparatus to adjust its height and reduce its footprint by telescoping during substrate transfer and expanding during processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If conventional batch processing apparatuses use fixed vertically spaced supports, then multiple substrates can be processed simultaneously, but the apparatus occupies excessive space due to fixed height requirements
Solution Approach 1:
The substrate supports are designed to be movable rather than fixed, allowing them to adjust their vertical positions dynamically. The supports can be repositioned to different heights to accommodate varying numbers of substrates in a batch, enabling the apparatus to optimize its footprint while maintaining processing capability for multiple substrates simultaneously
Solution Approach 2:
The substrate supports are arranged in a nested configuration where multiple supports can be vertically stacked or nested within the apparatus body. When not in use or when processing fewer substrates, the supports can be retracted or nested closer together, reducing the overall apparatus height and footprint while still maintaining the capability to process multiple substrates when needed
2Manufacturing precision
If fixed spacing between supports is maintained, then proper substrate alignment is achieved, but the apparatus height must be twice the product of number of supports and spacing
Solution Approach 1:
The support spacing is made adjustable rather than fixed, allowing the apparatus to maintain proper substrate alignment (twice the spacing) only when substrates are present, while reducing the overall apparatus height when supports are repositioned or nested during non-processing or transfer operations
3Productivity
If batch processing is used to reduce cost of ownership, then processing time is saved, but the apparatus occupies large valuable space in the fab
Solution Approach 1:
The apparatus uses dynamically adjustable support positions that can be optimized for different batch sizes. This allows the same apparatus to efficiently process multiple substrates in batch mode when needed, while minimizing its footprint during transfer operations or when processing fewer substrates, thereby reducing overall space occupation in the fabrication facility
Solution Approach 2:
The apparatus is designed to perform multiple functions: it can process varying numbers of substrates in batch mode, transfer substrates individually or in groups, and adjust its configuration to optimize for either high-throughput batch processing or space-efficient operation, making it universally applicable to different production scenarios
Data Source
AI summary
Embodiments of batch processing apparatus and collapsible substrate support are provided herein. In some embodiments, a collapsible substrate support includes a base linearly moveable between a first position and a second position; and a first plurality of substrate support elements coupled to the base and including a lowermost substrate support element disposed in a fixed position with respect to the base and an uppermost substrate support element disposed above the lowermost substrate support element, wherein the uppermost substrate support element is linearly movable between a first position nearer to the lowermost substrate support element and a second position further from the lowermost substrate support element.